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研究生： 黃文傑
Huang, Wen-Chieh
論文名稱： 可溶液式高介電常數絕緣層於五環素有機反向器之研究
Solution-processed Barium Titanate and Barium Zirconate Titanate Insulators for Pentacene-based Inverters
指導教授： 王永和
Wang, Yeong-Her
學位類別： 碩士
Master
系所名稱： 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics
論文出版年： 2011
畢業學年度： 99
語文別： 英文
論文頁數： 92
中文關鍵詞： 有機薄膜電晶體 、五環素 、反向器 、電壓轉換曲線 、負載線分析
外文關鍵詞： organic thin film transistors, pemtacene, inverter, load line analyses
相關次數： 點閱：120  下載：2 
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    • 本研究主要搭配溶液式介電材料鈦酸鋇與鋯鈦酸鋇於五環素增強型負載之有機反向器，在本研究中將改善了傳統增強型負載有機反向器之缺點:低增益 、擺幅的限制、及較高消耗功率，所以利用高介電常數材料之特性將其改善元件之特性，並在實驗中發現鋯鈦酸鋇比起鈦酸鋇有更好的特性: 擺幅範圍(63.4%和55.2%)、電壓增益(9.98和8.76)、低操作電壓(-5V)、低消耗功率(1.14和0.86μW)，最後利用負載線理論分析進行驗證，可模擬出電壓傳輸曲線，並與實際量測值比較，使實驗數據更為可靠與真實，以期未來能將其製作更為複雜之邏輯電路。

    In this thesis, pentacene-based organic inverters with solution-processed barium zirconate titanate and barium titanate as gate dielectrics are successfully demonstrated. Compared with traditional enhancement-load inverters, this work has been improved several shortcomings, such as low gain, limit the swing, and the high power consumption, which can be achieved by substituting low for high dielectric constant insulators. The enhancement-mode load pentacene-based inverters with solution-processed high permittivity barium titanate and barium zirconate titanate insulators showed larger swing ratio of 55.2 and 63.4%, high gain of 8.76 and 9.98, low operating voltage of -5 V as well as low power dissipation of 0.86 and 1.14 μW, respectively. Finally, to further investigate the superior performance, we also verify this results by load line theorem which can be simulated the voltage transfer curve. The simulated voltage transfer curve also indicated that very good agreements between simulation and experimental results can be achieved.

    摘要 I Abstract II 誌謝 IV Contents VI Table Captions X Figure Captions XI Chapter 1 1 Introduction 1 1-1 1 Introduction to the development of OTFTs 1 1-2 2 Advantages of OTFTs 2 1-3 3 Development of and research on OTFTs worldwide 3 1-4 4 Background and Motivation 4 1-5 6 Organization of the Thesis 6 Chapter 2 7 Organic Semiconductor 7 2-1 7 Physics of organic semiconductors 7 2-1-1 Formation of π electrons and π system [40] 7 2-1-2 Charge transport 12 2-2 18 Organic semiconductor materials 18 2-3 20 Principle of OTFTs and the inverter 20 2-3-1 OTFT 20 2-3-2 Mobility 22 2-3-3 Threshold voltage 23 2-3-4 On/Off current ratio 25 2-3-5 Subthreshold swing 25 2-3-6 Fundamental organic inverter 28 2-3-7 Characteristics of organic inverter [48] 30 2-3-7-1 Fundamental parameters 30 2-3-7-2 Inverter gain 32 2-3-7-3 Noise margin 32 2-3-7-4 Noise margin definition 33 2-3-7-5 Power consumption 34 Chapter 3 38 Equipment and Experiment processes 38 3-1 38 Fabrication equipment 38 3-1-1 Sputter 38 3-1-2 Thermal evaporator 41 3-1-3 Spin coater 42 3-2 44 Experimental processes 44 3-2-1 Substrate cleaning 44 3-2-2 Gate electrode 44 3-2-3 Solution preparation 44 3-2-3-1 BTO 44 3-2-3-2 BZT 45 3-2-4 Gate dielectric layer 46 3-2-4-1 BTO layer 46 3-2-4-2 BZT layer 46 3-2-5 Active layer 46 3-2-6 Inverters and transistors 47 3-2-7 Measurement equipment 47 Chapter 4 55 Results and discussion 55 4-1 56 I-V characteristics 56 4-1-1 Driver and load transistor with BTO insulators 56 4-1-2 Driver and load transistor with BZT insulators 57 4-1-3 Comparison 58 4-2 64 VTCs 64 4-2-1 BTO insulators of the inverter 64 4-2-1-1 Voltage transfer curve 64 4-2-1-2 Noise Margin 65 4-2-1-3 Hysteresis Effect 65 4-2-1-4 Power Consumption 65 4-2-2 The inverter with BZT insulators 66 4-2-2-2 Noise margin 66 4-2-2-3 Hysteresis effect 67 4-2-2-4 Power consumption 67 4-2-3 Comparison 67 4-3 74 Analysis of the theoretical load line diagram 74 4-3-1 Fundamental definition 74 4-3-2 Load line diagram of the proposed organic inverter 75 4-3-3 Theoretical and experimental VTC 75 4-4 80 Comparison with the published pentacene-based inverters 80 Chapter 5 82 Conclusions and Future Prospects 82 5-1 Conclusions 82 5-2 Future prospects 83 REFERENCES 85

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