本文主要探討表面黏著性質對傾斜微柱結構與剛性平板間接觸滑動之影響。利用樑柱大變形彈性理論(Elastica theory)結合數值方法(shooting method)分析傾斜微結構的變形，並應用有限元素軟體ABAQUS建立數值模型做更廣泛的探討，其中利用自定義元素建立黏著元素描述黏著力與表面間垂直距離之關係，並採用二維樑元素及三維實體元素做為微柱結構之分析元素，探討微柱結構傾斜角度 、相對下壓量 、黏著元素參數 、 及滑動方向對整體力學行為的影響，分別比較其剪力、正向力與有效摩擦係數之結果。

This research studies the effect of surface adhesion on the sliding contact between inclined micro-structures and a rigid plate. The deformation of the inclined micro-structures is analyzed by using Elastica theory with shooting method. More detailed analysis was done by numerical model built in finite element software ABAQUS. In the finite element simulation, 2D beam elements and 3D solid elements model the inclined micro-structures, and the cohesive zone element for describing the relation between adhesive stress and the surface distance was implanted by user-defined element. The effect of the inclined angle , the approaching distance , the parameters and in the cohesive zone element, and the sliding direction on the deformation of micro-structures are discussed. The comparison of shear force, normal force, and the effective friction coefficient are shown in our results.

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