微尺寸流體熱傳現象與巨觀下傳統理論有很大的不同，以微機電所製作微小化的實驗系統最適合用來研究微小尺寸流體及熱傳的現象。
　　本實驗採用積體電路製程與微機電技術將微溫度感測器陣列和微加熱器整合於一長寬各為1.5公分的晶片內，本系統可以用來加熱微管道並可同時研究微管道內兩相流及熱傳的現象，晶片可以提供一穩定的熱通量在微管道上而且同時能量測局部的熱傳遞現象。
　　製程上使用六吋晶圓為基材並利用高溫低壓爐管沉積法、乾式蝕刻法、濕式蝕刻法、曝光顯影…等製程，而微溫度感測器與微加熱器的製程是在複晶矽上摻雜不同濃度的硼離子，在製作微熱晶片的過程中遭遇到非常多的困難例如晶圓製造過程中的污染、線路的短路、蝕刻深度的不足…等，解決的方法有過度蝕刻、兩段式蝕刻、修改光罩外型、正確的清洗製程…等，在實驗中一些新發展出的製程方法在論文中將會有詳細的討論。
　　微熱晶片已經成功的製作及測試完成，微溫度感測器的溫度係數為-0.001/℃，微加熱器的溫度係數趨近於零而且溫度可以加熱至100℃元件仍然不會有損壞的情形。

　　The micro-scale thermal fluid phenomena may be different from conventional theories. The MEMS is the most suitable devices for use in the experimental studies of the micro-scale flow and heat transfer.
　　The objective of the present work adopts both the IC processing and the MEMS techniques to fabricate a integrated arrays of micro-sensors together with micro-heaters within a 1.5cm×1.5cm chip. This system can be used to fabricate a heated micro channel that can be used to study micro-scale two phase flow and heat transfer process. 　　This chip needs to provide a uniform high heat flux on one side of the channel walls and measurements of the local heat transfer process. Therefore, all of the sensors and the heaters were made of polysilicon doped with different concentration, which are deposited by LPCVD and patterned by photolithography, and RIE dry etch process, respectively, on a 6 inch p-type (100) silicon wafer. Many problems encountered during fabrication such as contamination by cleaning process, short circuit due to deficiently etched polysilicon etc. This deficiently etched polysilicon may need over etching, two-step etch process or slight modified photomask for correction. An accurate cleaning process has achieved the goals. Meanwhile, many fabrication techniques developed in this work will be presented and discussed.
　　The micro thermal chip has been successfully fabricated and tested. The temperature coefficient of resistivity for both the micro temperature sensors and the micro heaters is –0.001/℃ and zero, respectively. The temperature on the thermal chip can be raised grater than 100℃ by the current micro heater without being damaged.

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