背光模組中的各式光學膜片，是讓液晶顯示器可以呈現高亮度且均勻的重要光學元件，本文提出一新式多層微結構之光學膜片，並整合LIGA-like技術和聚二甲基矽氧（PDMS：polydimethylsiloxane)軟微影製程技術，製作出此複合式光學膜片。複合式光學膜片上下表面具有微透鏡和微金字塔之微結構，光線經過其微結構時，透過反射與折射，使複合式光學膜片具有導光和集中的功能；膜片內含空氣氣泡微粒子，光線經過微粒子時，由於空氣和PDMS折射率不同，會產生散射使複合式光學膜片具有擴散之功能。此複合式光學膜片製程首先利用熱回流法在矽晶圓上製作出微透鏡，接著PDMS澆鑄在光阻微透鏡上得到微透鏡母模；微金字塔母模是利用濕蝕刻技術在矽晶圓上進行非等向性蝕刻而成，其次在微金字塔母模澆鑄內含空氣氣泡微粒子之PDMS，將微透鏡母模輕壓覆蓋其上，加熱固化成形。此新型LIGA-like技術製作複合式光學膜片具一體成形、複製微結構具低表面粗糙度、低溫低壓下即可重複製造等優點。由實驗證實，利用BM-7A進行9點輝度量測，均勻度計算結果為72.8％，具有良好之光學效果。

This paper brings up a new type of optical film which uses multi-layer micro structures, integration LIGA-like technology and PDMS (polydimethylsiloxane) soft lithography technology. Micro lens and micro pyramid structures respectively on top and bottom surfaces of this hybrid optical film, cause reflection and refraction when light passes through the micro structures, which enables the hybrid optical film to guide light and enhance brightness. Besides, there are a lot of air bubble granules randomly distributing inside the film; when light passes through the air bubble granules; it bring scattering because of different refraction indexes between air and PDMS, which makes the hybrid optical film has capable of diffusion. Integration LIGA-like technology and PDMS soft lithography technology to make hybrid optical film has many advantages, such as one piece PDMS which allows quick manufactory, high performance of replication, and low requirement of temperature and pressure for reproduction. From experimentation, utilizing BM-7A to measure nine points of luminance, the result of uniformity is 72.8％, which confirms fine efficiency of the hybrid optical film .

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