本研究針對微型生化反應槽，從相關理論、設計、製程、封裝、測試以及相關模組元件做有系統的探討。其中包括了玻璃材質的微型生化反應槽與十字電泳分離管道的整合晶片以及使用PDMS做為材質並具有溫度控制功能的微型生化反應槽兩大主題。最後並利用胰蛋白脢消化反應做為評估微型反應槽效能表現的基準。
　　在玻璃微型反應槽的設計上，本研究利用微型水壩結構將表面固定有胰蛋白脢的微粒集中在反應槽中，以達到線上消化反應(On-line digestion)的功能，並且提出單一光罩快速製作微型水壩結構的方式，此舉不但能簡化製程步驟還可提高製作良率，並節省研究成本。本研究並針對此一整合型晶片進行一系列的測試以評估其適用性及微型水壩結構之可靠度。
　　在具有溫度控制元件的PDMS微型反應槽的研究中，本文利用鉑金屬溫度變化與電阻變化的線性關係製作微型溫度感測器，此外並設計適當電阻值之鉑電阻絲做為微型加熱器，再利用資料擷取系統以及脈波寬度調變的方式以改變加熱功率的輸出，進行控制反應槽中的溫度。最後本研究並利用紅外線熱相儀針對微型反應槽內溫度的分佈情形做一系列的探討。在胰蛋白脢消化反應的測試上，本研究進行了溫度控制對於消化反應的影響，微量樣品的檢測，以及連續注射樣品時是否會發生污染這三個方向的研究。
　　總而言之，本研究利用一些快速可靠的微機電製程技術製作具有生化反應槽功能之微流體元件，並且以實驗方式證明所製作的微型生化反應槽可以成功地處理微量檢測樣品並將之應用在胰蛋白脢消反應。

The present paper reports design, fabrication, and characterization of micro bio-reactors using MEMS technologies. Microchannels on soda-lime glass and PDMS substrates are fabricated and integrated with a temperature control module composed of micro temperature sensors and heaters. Principles, designs, fabrication process, and characterization of these microfluidic devices are demonstrated. At last, trypsin digestion of several proteins is used to characterize the performance of those reactors.

First, a fast and simple fabrication method to make micro-dam structures on glass substrates is developed. Only one mask is required to form channels with different depths, resulting in a “dam”. Beads immobilized with specific enzymes can be constrained in this specific region such that on-line digestion can be performed in this chip. After protein samples flow through these trypsin beds constrained by the micro dam structures, they can be digested into peptides. The performance of the enzyme digestion has been confirmed by mass spectrometry.
Alternatively, PDMS micro bio-reactors with temperature control modules are demonstrated. Platinum is used as a material for temperature sensors and heaters as well, simplifying the fabrication process for temperature control modules. Pulse width modulation is used to control the heating power of the micro heaters to maintain the required temperature for trypsin digestion. Temperature distributions of the bio-reactors are measured using an infrared thermal imager. At last, the performance of this micro bio-reactor is evaluated by performing a series of bio-reactions.
In summary, this paper demonstrates a simple and reliable process to fabricate bio-reactors integrated with microfluidic devices. Characterization of these bio-reactors has been performed by measuring temperature distribution executing bio-reactions. Experimental data show that the miniaturized device has several advantages over their large-scale counterparts, including temperature uniformity, less sample and reagent consumption, power consumption, less dead volume and portability. The bio-reactors could be promising while applied for micro total analysis systems.

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