中文摘要
　　本文主要建立二維有限元素分析模型模擬滾輪式微米壓印過程中材料因模具壓印所產生之變形狀況。數值模型採用Coupled Eulerian-Lagrangian 方法模擬黏彈性/流體材料與模具互動之動態分析。首先探討模具條件改變對於載重大小及壓印形狀的影響，包含模具軟硬和形狀特徵。同時，探討材料參數改變，包含材料性質和材料厚度對於壓印結果之影響。對黏彈性材料而言，原本預設壓印形狀平坦區於模具脫離後容易產生彈性恢復的隆起形狀，材料厚度越小，產生邊緣凸起高度較小；當材料鬆弛時間相對於壓印時間越長，其壓印形狀在模具脫離後整體改變越大。壓印速度影響載重大小，但模具與材料間之接觸摩擦係數對載重影響甚小。此外，亦探討有無重力場對流體材料壓印結果之影響。

Abstract
　　This thesis developed two-dimensional finite element models to simulate the deformation of imprinting material caused by the compression of the mold during roller imprinting process. The coupled Eulerian-Lagrangian method was used in the model for the dynamic analysis of the interaction between the viscoelastic/fluid material and the mold. The effects of the mold conditions, including the mold’s property and geometric feature, on the applied load and deformation were investigated. It was also discussed the effects of the material parameters on the imprinting results, such as material properties and thickness. For viscoelastic materials, the flat contact region elevated after the material separated from the mold. However, thin material has less elevation. For the materials whose relaxation time is longer than the loading time, the imprinting shape evolved and differed significantly from the mold feature, after the separation occurred. Imprinting velocity affects the applied load, but the contact friction coefficient does almost not. Besides, the influence of gravity was discussed for the imprinting results of the fluidic materials.

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