本論文係利用微波頻率2.45GHz，最大功率為3kW之單模腔微波燒結爐進行高熱傳氮化鋁陶瓷燒結研究，針對自我燃燒合成法(SHS)製作之氮化鋁粉體及微波快速加熱的優點，探討承載坩堝大小對微波燒結之影響，以及不同燒結助劑添加量對氮化鋁燒結體各種性質之影響，如收縮行為，二次相組成及分布，微結構，熱傳導，介電性質等。研究發現以較大之承載坩堝進行微波燒結具有較好之收縮率，而適當之助劑添加量可幫助氮化鋁燒結緻密，但過量之助劑會導致熱傳導值降低。本實驗亦發現添加微量的碳可減少晶界中二次相的含量，並提高熱傳導值。為了比較微波燒結與傳統燒結之差異，本研究以石墨熱壓爐在1850℃下，持溫2.5hr進行燒結，並與微波燒結作比較。

The single-mode microwave furnace with 2.45GHz microwave frequency and 3kW power was used to sinter high thermal conductivity AlN ceramics. The effects of crucible diameter and amount of additives on densification behavior, phase composition, phase distribution, microstructure, thermal conductivity, and dielectric properties were studied by using SHS-produced AlN powder with microwave sintering. The results indicate that the use of crucible with larger diameter have better shrinkage. Appropriate amount of sintering aids was used to increase thermal conductivity, however, the thermal conductivity of AlN decreases while excess aids exists. A small amount of Cabon addition can further increase thermal conductivity by decreasing the volume of secondary phase. In order to investigate the differences between microwave sintering and traditional sintering. AlN was sintered at 1850℃ for 2.5hr in hot-pressed furnace.

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