鈮酸鋰晶圓起源於1928年，是一種鈮、鋰、氧的化合物，且不溶於水，無色固體。鈮酸鋰具有多種光學特性，如雙折射性、壓電、聲光、以及非線性光等等，對於光學應用製作積體光路有相當大的潛力，本篇論文將探討在通訊波段為1552奈米下，在鈮酸鋰晶圓上，以硬脂酸當作交換源，鈦薄膜當作遮罩，進行質子交換波導製程，製作出耦合間隙為0.6微米之雙圓環共振腔以及1×2標準型分光比50:50，WMMI為20微米之多模干涉圓環共振腔。實驗過後成功的運用，將波段1552奈米鐳射二極體再搭配摻鉺光纖放大器(EDFA)利用耦合方式導入共振腔，利用光場量測之光場圖判定光波導的導光優劣度，最後改為使用光纖連接到光頻譜分析儀(OSA)進行穿透頻譜量測分析。
鈮酸鋰質子交換製作光波導，在1982年提出，硬脂酸粉末是一個價格便宜、無毒性、不會腐蝕以及使用安全，故適合本實驗作為交換源，在深入的了解質子交換，對於其在溫度與時間的穩定控制下，方能成功的製作出耦合間隙為0.6微米之雙圓環共振腔。環形共振腔要成功達到耦合共振效果，要遵循兩項原理：(1)全反射定理，(2)符合建設性干涉原理，另外還有三個重點，耦合長度(範圍)、折射率以及波導與環的耦合間隙，利用菱鏡耦合儀測得質子交換波導層的折射率，越短的波導與圓環間隙距離，將會有良好的耦合效率，而波導長度也要夠長，才能使波導與圓環間有耦合現象。多模干涉圓環共振腔利用自成像原理，在特定的距離下，將一光場入射至一個可存在多模態的波導中，行進方向具有週期性、重複的干涉變化，產生一個或多個與原入射光場相同但能量強度下降的光場，不同模態的傳播速度差異，會產生不同模態間相互干涉的現象，經過特定距離產生具有建設性或破壞性干涉的變化，運用此特性控制多模態波導的長度，可以有效的達到特定比例的分光效果。本論文將詳細介紹雙圓環共振腔與多模干涉圓環共振腔的簡介、原理、製作流程以及頻譜量測分析。

Proton-exchanged(PE) double ring resonators with a guide width 0.6μm and 58.6μm outer diameter and 1×2 general MMI have been fabricated on Z-cut lithium niobate(LiNbO3). Ring resonators on LiNbO3 are particularly appealing because of the possibility of high electro-optic(EO) coefficients and nonlinear coefficients. Proton-exchanged(PE) in LiNbO3 permits a large n so that one can fabricate small rings with low radiation loss. The resonator structure was defined in a 150nm layer of Titanium(Ti) with the PE in Stearic Acid carried out at 280°C for 2 hours. The technique is gaining considerable interest because of its distinct advantages: simplicity and relatively low exchange temperatures comparing to the standard titanium diffusion technique. Here we report further details on fabrication, and performance at 1552nm. We measure the characteristic of the device by CCD camera and the optical spectrum analyzer. The measured transmission spectrum of the double ring resonators and the MMI ring resonator around 1552nm are presented in Fig. 3 and Fig. 4. TM polarization of the waveguide bus can be coupled into the ring resonator. The extinction ratio of double ring resonators at the resonant wavelengths is approximately 10 dB.

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第五章
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