本研究針對微奈米尺度之多層薄膜的熱擴散係數進行量測與分析。本研究之薄膜樣本為兩層堆疊之薄膜，並鍍製於不鏽鋼金屬基板上，每層薄膜的熱傳導性質皆不相同，且薄膜尺度極小，其熱傳行為將會深受尺度效應以及界面熱阻的影響，因此一般傳統量測方法已不適用。在薄膜的量測上，本研究使用溫度震盪法作為量測熱擴散係數的方法，不同於量測兩界面溫差推導其熱傳性質，而是以兩界面感測到溫度的時間差來做熱傳性質之推導。溫度震盪法實驗建立時，需要可輸出穩定震盪波的熱源，精準的溫度擷取設備，以及配合理論解設計實驗為一維之熱傳。本研究使用致冷片搭配555震盪電路作為熱源，配合自製之散熱夾具作為散熱系統，可輸出穩定震盪波，並達成一維熱傳之實驗設計。固定於致冷片上方之薄膜試片輸入熱源後，不同界面上使用熱電偶感受到的溫度震盪波將會產生相位差，但此相位差卻包含兩熱電偶與界面接觸狀況不相同所造成之誤差，因此本研究設計出變頻率法實驗，找出此誤差。但在使用變頻率法做量測時，熱飄移會造成另一誤差，在第三根熱電偶的加入後，可將其中兩熱電偶至於同界面上偵測此誤差。在這些誤差的扣除後即可找出材料之熱傳性質。此法之優點為便宜簡單，且屬於非破壞性檢測方法。

In the present study, the thermal diffusivities (α) of all film layers and the substrate of two multi-layered specimens are evaluated and compared with the reported results in literatures. First of all, the heat conduction solution in the multi-layered specimens is developed to be one-dimensional and varying with the amplitude and frequency of the oscillating temperature imposed by the Peltier beneath the specimen’s substrate. Then, there exists different temperature phase lag at every layer including the substrate w.r.t. the temperature of the peltier. The difference in the temperature phase lag between the top and bottom surfaces of each layer can be expressed as a function of film thickness (d), oscillating temperature frequency (ω) and thermal diffusivity (α) of this layer. A heating container of specimen is appropriately designed with a ventilation system for peltier such that the oscillating temperature at everywhere of the specimen is ensured to be operating one-dimensional, steady-state condition. Two of three thermocouples are placed to have their tip in contact with the top surfaces of two adjacent layers individually in order to measure the phase lag occurring in the layer between these two surfaces. The third thermocouple can be placed on either of these two top surfaces in order to evaluate the error of phase lag due to the use of two different channels of signal acquisition system. The difference between the above two phase lags is defined as the real phase lag of this layer. This phase lag value is then substituted into the previously developed phase lag expression to determine the thermal diffusivity of the layer. The thermal diffusivities of all layers in the multilayered specimens determined by the present theoretical model and experimental method have been confirmed to be close to those reported in the literatures.

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