本文運用空氣軸承氣浮原理，設計一低摩擦氣靜壓軸承式氣壓缸及滑動平台，改善氣壓缸及平台的黏滯滑動(stick slip)現象。首先自行設計嵌入氣靜壓軸承之低摩擦氣壓缸，作為平台的致動器，以便降低氣壓缸摩擦力，降低氣壓缸黏滯滑動現象，提高氣壓缸作動頻率及使用壽命。並利用有限差分法對所設計之氣壓缸作模擬分析，分別在不同參數下計算其負載能力、剛性及氣體洩漏量，並提出改良方案。然後利用氣靜壓軸承建構一低摩擦氣壓平台。並用有限差分法對此平台所使用之氣靜壓軸承分別在不同參數下作分析。然後設計一摩擦力量測平台，進行氣壓缸之摩擦力量測，繪製摩擦力與速度之關係圖。並使用上述之氣壓缸及平台，建構一低摩擦氣壓伺服定位平台，完成初步控制，藉以觀察其性能及控制效果，以作為未來進ㄧ步研究之依據。

　The objectives of the thesis are to design a low friction aerostatic bearing cylinder and to design a low friction aerostatic bearing guided sliding platform. The stick-slip phenomenon of cylinder and sliding table can be reduced by using the non-contact characteristics of aerostatic bearings. At first, an aerostatic bearing pneumatic cylinder is designed, in which piston and rod are mounted with aerostatic bearings. And the cylinder is analyzed by applying the finite difference method. The different parameters, the load capacity, stiffness and flow rate are computed and the analyzed results are compared. Then, the improved proposals of design are suggested. Furthermore, a frictionless sliding platform is built up by using aerostatic bearing as linear guide. An air film separates the slider and the guide to attain a non-contact motion. Applying the same method as before, the platform is simulated and the improved proposals of design are also suggested. In the study, friction force of the designed pneumatic cylinder is measured, and a low friction servo pneumatic driven table is also built up by combining the designed cylinder with the designed platform. Finally, a preliminary feedback controller is designed and the experiment of the low friction aerostatic bearing pneumatic table is undertaken, and the results are shown in the study.

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