此研究為利用陶瓷金屬材料建立多層膜結構發展能耐高溫之吸收膜
，其應用於聚焦型太陽能發電系統之集熱器上，目的是為了能夠提高對太陽輻射熱能的吸收，且可在高溫之於能不受破壞。本研究之吸收膜結構為在拋光過之SUS 304不鏽鋼基板上利用磁控濺鍍系統濺鍍一層鉻金屬反射層，接著利用共濺鍍系統濺鍍氮化鋁與金屬鎢之瓷金材料作為其主要吸收層，最後利用射頻濺鍍系統將三氧化二鋁及氮化矽材料堆疊完成，作為其吸收膜之抗反射層，目的為增加其吸收率；然而利用商用套裝軟體COMSOL Multiphysics 建構數學式，來模擬太陽光之傳播特性，並求得其吸收率、反射率、穿透率，求出最佳之各層膜厚，作為實驗之參考依據，並將其實驗結果與模擬結果作比對。

This study is aimed at the development of the high-temperature and high absorptance cermet-based multilayer thin film coating. These absorbers are used in the concentrating solar power technologies for absorbing solar radiation at high temperature. In the fabrication process, firstly a metal layer which serves as an infrared reflector is coated on the stainless steel (SUS-304) substrate. The cermet layer is made of aluminum nitride (AlN) and tungsten (W) and is coated with the metal layer by using the Co-sputtering process. Semiconductor material layer like aluminum oxide (Al2O3) or Silicon nitride (Si3N4) is coated on the cermet layer which serves as an anti-reflection coating. These multilayers are coated to achieve high absorptance and low thermal emittance. These thicknesses of the layers are arranged in the table from 10nm to 100nm and simulated by using a commercial package, COMSOL Multiphysics. The optimal values of the thicknesses suggested by the simulation are utilized for the coating. Experiments on measuring the absorptance and the emittance of the film coating are conducted, and the results are compared to the simulation.

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