全球半導體產業在 AI、5G、電動車與物聯網等應用驅動下持續擴張，台灣作為全球先進製程最為集中的生產基地，2025 年半導體設備採購規模達 315 億美元（年增 90%），躍居全球第二大設備市場。然而，多數國際真空設備供應商於台灣的布局現階段以銷售服務與組裝為主，泵浦轉子、定子等關鍵零組件之精密加工製造能力多位於歐洲或東北亞工廠。此一「需求集中於台灣、關鍵製造配置於海外」的全球分工型態，使設備供應商於交貨週期、供應鏈韌性與晶圓廠 ESG 採購標準下，逐漸使「是否深化在地化生產」成為設備供應商值得系統性評估的策略議題。
針對上述產業問題，本研究建構一套適用於半導體真空設備供應商的在地化策略決策模型，協助設備供應商系統性評估在台灣推動深度在地化生產的策略合理性、ESG 永續效益與財務可行性。研究方法整合 Porter 五力分析、鑽石模型、SWOT/TOWS 矩陣與折現現金流量法（DCF）四項策略分析工具，依「產業、國家、企業、方案」四層架構操作化，並採次級資料分析法與多案例比較研究法蒐集分析公開資料；並以一家具全球領先地位之乾式真空設備供應商作為去識別化之驗證案例，檢驗該模型之可操作性與解釋力。模型分析顯示，台灣半導體真空設備市場約佔全球四成（依公開資料推估），具備在地化生產之完整產業群聚條件；於模型試算下，「漸進式升級」與「全新設廠」兩種投資情境均為正淨現值（NPV）之可行方案，其中漸進式升級於投資規模、回收期與內部報酬率（IRR）三項指標上具相對優勢。在「設備商、晶圓廠、產業生態系」三贏價值架構的驗證下，深化在地化生產可同時提升供應鏈履約韌性、降低運輸碳排放並創造可量化之財務回報，為半導體真空設備供應商之在地化決策提供具學理基礎之分析框架與實務操作路徑。

Driven by the rapid expansion of applications such as AI, 5G, electric vehicles, and the Internet of Things, the global semiconductor industry continues to grow, with Taiwan serving as the world's most concentrated hub of advanced-process manufacturing. Taiwan's semiconductor equipment spending reached US$31.5 billion in 2025 (a 90% year-on-year increase), positioning it as the world's second-largest equipment market.
Despite this industry tailwind, most international vacuum equipment suppliers maintain only sales-service and assembly operations in Taiwan, while precision machining of critical components such as pump rotors and stators remains located in factories in Europe or Northeast Asia. This "demand-in-Taiwan, manufacturing-abroad" structure has created persistent gaps in delivery lead time, supply chain resilience, and ESG performance under wafer fabs' increasingly stringent procurement standards, making the deepening of localized production in Taiwan a strategic question that semiconductor vacuum equipment suppliers must carefully evaluate.
Based on the findings of this research, deepening localized production in Taiwan can simultaneously enhance supply chain resilience, reduce transportation carbon emissions, and generate quantifiable financial returns, thereby offering semiconductor vacuum equipment suppliers a theoretically grounded analytical framework and a practically actionable pathway for localization decision-making.

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