本論文主要利用LIGA-like製程，將厚膜光阻應用於製作積體堆疊微結構與光學微透鏡陣列上，並結合微電鑄金屬鎳技術與真空澆鑄高分子翻模法，其加工精度可達微米級，產生大量製造的效果。

　　在積體化堆疊微結構方面，以高分子與金屬堆疊微結構為主，設計其應用於微噴液元件形成單石噴液系統(Monolithic)上，利用黃光微影對於SU-8負型光阻進行加工，形成微流道與其腔體，再利用JSR THB-130N負型光阻製作金屬鎳噴孔母模，並配合微電鑄技術製作金屬噴孔薄板，探討高分子與金屬層製作時所產生的影響(包括收縮與疏水性)。提出背後曝光技術與微波氧電漿表面處理製程技術改善其堆疊結構，發展相關理論，並比較其優缺點，目前已可實現物理解析度300 dpi~1200 dpi之高分子與金屬堆疊微結構。

　　在光學微透鏡陣列製作部份，以熱熔式光阻技術為主，選取負型光阻JSR THB-130N進行研究，探討退火方法與熱分佈對其影響，並利用曲線契合法將透鏡的曲率與圓錐常數求出，再利用光學顯微鏡、曲線契合法及造鏡者公式，對於所製作的微透鏡進行光學量測與分析，最後以LIGA-like製程完成鎳金屬模仁與真空澆鑄高分子翻模出微透鏡陣列，此技術可廣泛的應用在背光板結構、微透鏡陣列、非球面微透鏡與光纖耦合等之光學元件製作。

　This study utilizes the LIGA-like processes which include thick photoresist lithography, micro-electroforming of metal nickel and vacuum casting to mold the polymer materials structures in order to fabricate the integrated stack microstructures and optical microlens arrays. The accuracy of these processes could reach a micrometer scale.

　In the section of integrated stack microstructures, the metal-polymer stacked microstructures can be designed specifically for the application of monolithic micro injecting element. The photolithography technology can also be used to pattern photoresist for the microchannel and chamber, and microelectroforming to fabricate nickel nozzle plate. When fabricating the metal-polymer stack microstructures, the shrinkage of patterned photoresist and the hydrophobic of polymer surface could be observed. The novel processes, the backside exposure method and the polymer surface treatment with micro-wave oxygen plasma, can improve the quality of stack microstructures. It is now tangible to fabricate 300 dpi ~ 1200 dpi of metal-polymer stack microstructures.

　The reflowed polymer technology is used to fabricate high density optical microlens arrays, and JSR THB-130N photoresist can be applied for this research of optical refractive microlens. The different heat treatments affect the reflowed microlens profiles, thus the different optical properties. The curvature and conic constant of microlens can be calculated with the curve fitting method; the spot size of microlens can be measured by optical microscopy devices. Then, the metal nickel mold can be fabricated with electroforming, and the polymer microlens arrays can be molded with the vacuum casting method. The results of reflowed microlens arrays can be applied for backlight structure, aspherical microlens and optical-fiber devices.

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