以質點網格法建構電漿在一維有限空間中的模型，研究電容耦合電漿中的二次電子效應。此模型可模擬電子在一維空間中的行為。首先，我們可在系統的粒子密度、電位及電場分布中，觀察到“電漿鞘”的現象。進一步，我們考慮由電子撞擊器壁產生的二次電子。“電漿鞘”的形成，與二次電子的行為極為相關。為了使二次電子效應更加貼近實際狀況，在模擬中我們同時考慮了粒子間的庫倫碰撞。電容耦合電漿被廣泛地利用在工業上的電漿製程中。因此，我們在模擬系統中加入交流電場，並且藉由粒子軌跡及系統能量的發展探究交流電場(造成粒子共振)的效應。

A Particle-in-Cell method is built in one-dimensional electrostatic model to study effects of secondary electron emission (SEE) in capacitively coupled plasma (CCP). The model simulate the particles’ behavior in one-dimensional space bounded by two walls. The generation of “plasma sheath” is observed. Furthermore, secondary electron emission is incorporated which is produced by electrons’ bombardment. The formation of plasma sheath is closely related to the behavior of secondary electrons. To deal the SEE effect more realistically, the particles’ Coulomb collision effect is included into the simulation. We also employ radio-frequency (RF) electric field into the system as in CCP widely used in industrial processes. By following particles’ trajectories and energy development, effects of RF bias (which can then give rise to resonance between the bounce motion of particles) is examined.

[1] M.D. Campanell, A.V.Khrabrov, and I.D.Kaganovich, “Absent of Debye
Sheaths due to Secondary Electron Emission,” Physics Review Letters, vol 108,
pp255001-1-255001-5, Jun. 2012

[2] Lin Xu, L. Chen, M.Funk, A. Ranjan, M. Hummel, R. Bravenec, R.
Sundararaajan, D.J. Economou, and V.M. Donnelly, “Diagnostics of ballistic
electrons in a dc/rf hybrid capacitively coupled discharge”
Applied Physics Letters, vol. 93, no. 26, pp.261502-1-261502-3, Feb.2008

[3] Francis F.Chen “Introduction to Plasma Physics and Controlled Fusion,” Plenum,New York, p.290, 1984

[4] K.Miyamoto , “Plasma Physics for Nuclear Fusion,” Kinger Publishing,Malabar
and Florida, p.9, 1992

[5] T.Takizuka and H.Abe, "A binary collision model for plasma simulation with
a particle code", Journal of Computational Physics 25, 205 ,1977

[6] M. Lieberman, A. Lichtenberg “ Principles of Plasma Discharges and Materials
Processing,” Wiely Interscience , p.167 ,p.229, 1994

[7] C. K. Birdsall and A. B. Langdon, “Plasma Physics via Computer Simulations,”
McGraw-Hill Book Company, New York, p.56 , 1985

[8] M.E.J. Newman and G.T. Barkema , “Monte Carlo Methods in Statistical
Physics,” Springer,NewYork, p.388,p.399, 2010

[9 ] Meijering, Erik , “A chronology of interpolation: from ancient astronomy to
modern signal and image processing”, Proceedings of the IEEE,
vol.90,10.1109/5.993400, p.319-342, Mar.2002

[10] W.Cheney and D.Kincaid, “Numerical Mathematics and Computing” Cengage learning, p.480, 2012

[11] M. Abramowitz and I.A. Stegun, “ Handbook of Mathematical Functions,” Dover, New York ,p.933, 1970

[12] M. Lieberman and A. Lichtenberg, “Regular and Chaotic Dynamics” Springer,New York,p.565,1992

[13] C.W.Huang, Y.C.Chen, and Y.Nishimura , “Particle-in-Cell simulation of plasma sheath dynamics with kinetic ions” IEEE Transactions on Plasma Science 42, 2014