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研究生： 曾煒傑
Tseng, Wei-Chieh
論文名稱： 具容錯轉移與負載平衡能力之全自動虛擬量測佈署系統
AVM Deployment System with Failover and Load-Balancing Capabilities
指導教授： 鄭芳田
Cheng, Fan-Tien
學位類別： 碩士
Master
系所名稱： 電機資訊學院 - 製造資訊與系統研究所
Institute of Manufacturing Information and Systems
論文出版年： 2014
畢業學年度： 102
語文別： 英文
論文頁數： 47
中文關鍵詞： 全自動虛擬量測系統 、容錯轉移機制 、負載平衡
外文關鍵詞： Automatic Virtual Metrology(AVM), Failover, Fault-Tolerant Mechanism, Load Balance, software Rejuvenation
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    • 虛擬量測技術可在產品尚未或無法進行實際量測的情況下，利用生產機台參數推估其產品的品質，以達到全檢的目標。而全自動虛擬量測系統主要應用在結構複雜之半導體、面板及太陽能產業，以進行線上且即時的產品品質預測、機台效能監控及生產製程改善。
    目前，在遭受不可抗力之環境因數導致全自動虛擬量測系統異常時，系統僅能依賴人力重新啟動。為了與生產線保持一天24小時不間斷地正常運轉並確保高產品良率，一個具備容錯能力的系統是不可或缺的。為了提升整體設備的效率，本論文將改善全自動虛擬量測系統，發展出一個具容錯轉移與負載平衡的系統架構，提供可靠度高且不間斷地連續服務。

    Virtual Metrology is a method to conjecture manufacturing quality of a process tool based on data sensed from the process tool and without physical metrology operations. In recent years, Automatic Virtual Metrology (AVM) System has been well developed and the AVM technology has been successfully tested in and transferred to semiconductor, thin-film-transistor-liquid-crystal-display (TFT-LCD), and solar industries to monitor the quality of production in real time.
    There has been an increasing demand for providing 24-hour non-interrupted process in manufacturing factories. With the purpose of enhancing the overall equipment effectiveness (OEE), a system with high availability (HA) is indispensable.
    This work proposes a framework of VM Administrator with fault-tolerant capability in the case of extraordinary circumstances. Moreover, VM Administrator shall also be responsible for balancing the high frequency workloads in production as well as coordinating with manufacturing execution system (MES). Finally, real data of a practical process tool are applied to validate the feasibility of the proposed framework.

    摘要 iii ABSTRACT iv ACKNOWLEDGEMENTS v FIGURE CONTENTS viii TABLE CONTENTS ix Chapter 1. INTRODUCTION 1 1.1 Background and Motivation 1 1.2 Purpose of this Dissertation 4 1.3 Organization 5 Chapter 2. RELATED WORK 6 2.1 Survey of Previous Work 6 2.2 Terminology 7 2.2.1 XML 7 2.2.2 SOAP 8 2.2.3 Web Service 9 2.2.4 Round-Robin Scheduling 11 2.3 FMECA 12 Chapter 3. AVM DEPLOYMENT SYSTEM FRAMEWORK 14 3.1 Standard database 15 3.2 Central database 15 3.3 VM Manager 15 3.4 VM Server 17 3.5 AVM System Administrator 19 Chapter 4. AVM SYSTEM ADMINISTRATOR DESIGN AND IMPLEMENTATION CONSIDERATIONS 22 4.1 Object-Oriented Analysis and Design 23 4.1.1 Use Case 1: Initialize AVMS 25 4.1.2 Use Case 2: Dispatch Command 26 4.1.3 Use Case 3: Evaluate Performance 26 4.1.4 Use Case 4: Load-Balancing Mechanism 27 4.1.5 Use Case 5: Failover Mechanism 30 4.1.6 Use Case 5: Reply Command 33 4.2 AVM system Scenario With VMSA 34 Chapter 5. RESULTS AND DISCCUSSION 36 5.1 System Environment 36 5.2 Illustrative Example 37 5.2.1 Scenario for Integrated Tests 37 5.2.2 Integrated Testing Results 41 Chapter 6. CONCLUSION AND FUTURE WORK 43 6.1 Conclusion 43 6.2 Future Work 44 REFERENCES 45

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