本研究設計數種微光學元件，並利用微機電系統製程技術以製作各元件使之應用於微光學桌中。基於不同的光學的特性，元件可分為下列三種模組:
(1). 微凹面鏡元件：運用雙層材料之殘留應力( Residual stress )，讓平面圓形之微結構能夠翹曲形成球狀的微面鏡，並運用數值模擬軟體來計算不同設計之微結構因殘餘的應力所造成的變形。若設計微凹面鏡，只要反推所需的焦距，即可算出結構的曲率半徑，並再用模擬軟體分析所要的設計，即能做出符合需求的微凹面鏡元件。
(2). 微分光鏡元件：一般製程代工所設計的微分光鏡，需要以外部光學補償作量測以改善其分光效果，而本研究提出之新式製程設計具有低成本與製程簡單兩種優點。只需要控制不同厚度的鉻薄膜來選擇不同的穿透率，作為分光系統之應用。
(3). 可調式微鏡面組：利用代工製程的優點，將光學系統中所需要的微反射鏡面應用在立體可旋轉式的轉盤上。並整合其他微光學元件結合在三維立體結構中，助於微光學系統量測與生醫晶片測量之應用。

　Design and fabrication of several micromachine-based optical devices by using MEMS technology are reported in the present study. Based on their optical operation principles, these devices have been classified into four categories:
(1) Micro concave mirrors
We apply the residual stress of gold films to produce a large defection of out-of-plane spherical mirrors. Numerical simulation and experimental data are in reasonable agreement in terms of defection of the mirror.
(2) Micro beam splitters
A new fabrication process using SU-8 high-aspect-ratio structures to form a micro-beam splitter has been demonstrated in the present study.
(3) Adjustable micro-mirror array
Vertical corner mirrors with adjustable displacement have been realized using MEMS technology.
At last, a new micro optical bench using the developed micro optical devices has been demonstrated to form a micro interferometer. The development of these micro optical devices and systems could be crucial for miniaturization of bio-sensing apparatus.

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