無線感測節點在近日發展蓬勃。能源採集器對於無線感測節點能源不可或缺。陽光及電池皆不可出現在無線感測節點時，振動式能源採集器可提供無線感測節點能源，特別是適合CMOS製程大量製造的靜電式振動能源採集器。文獻中有許多靜電式振動能源採集器，比較他們的性能很重要。而性能的考量，除了最大功率輸出外，還有頻寬、共振頻率、振動振幅、體積、結構型態及外接電壓或輸出電壓。現有的能源指標，無一包含上述所有；本論文提出了一個包含上述所有因素的性能指標來評估靜電式振動能源採集器的性能，結果顯示本性能指標比起現有指標能夠有效評估不同頻寬的振動能源採集器，亦能評估不同結構之靜電式振動能源採集器，且給予相同平均值。

Wireless sensor nodes promising many potential applications are feasible only if energy harvester technology is mature. Scavenging vibration energy from ambient environment has become an important issue when solar energy is not applicable and batteries are not suitable. There are many works on electrostatic vibration energy harvesters, whose power output is influenced by resonant frequency, volume/mass, excitation amplitude, bandwidth, structure configuration, and input/bias voltage. A performance index considering all above factors is proposed in this work. The result shows that this index can compare electrostatic vibration energy harvesters of all structure configurations with different bandwidth and different capacitance.

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