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研究生: 高尉珈
Kao, Wei-Chia
論文名稱: 以鑭鍶錳氧作為犧牲層製備鈷鐵氧自支撐薄膜之物性研究
Investigating the Physical Properties of Freestanding CoFe2O4 Thin Films Utilizing Lanthanum Strontium Manganite as the Sacrificial Layer
指導教授: 楊展其
Yang, Jan-Chi
學位類別: 碩士
Master
系所名稱: 理學院 - 物理學系
Department of Physics
論文出版年: 2023
畢業學年度: 111
語文別: 中文
論文頁數: 47
中文關鍵詞: 自支撐複合氧化物脈衝雷射沉積可撓式磁性材料
外文關鍵詞: Freestanding, complex oxide, pulsed laser deposition, flexible magnetic materials
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  • 藉由將單晶薄膜從基板上分離,轉移至其他基板上,創造出新的異質介面。本研究利用犧牲層的蝕刻來轉移單晶薄膜技術,能夠在轉移後依然保有原來的單晶薄膜特性,不會損壞結構。
    CoFe_2 O_4(CFO)是一種具有亞鐵磁性和磁異向性特性的材料,也因為磁滯伸縮特性,被廣泛應用於磁性感測器上。為了討論CFO與應力相關機制,我們以La_0.7 Sr_0.3MnO_3(LSMO)當作犧牲層將CFO薄膜freestanding到可饒式投影片上,觀察freestanding前和freestanding後的表面和應力變化,在施加不同磁場後,利用磁力顯微鏡(Magnetic force microscopy;MFM)觀察不同磁場下的磁矩變化。本研究中將利用拉曼光譜儀(Raman spectroscopy)量測CFO不同應力下的聲子振動,利用拉曼振動峰的平移,觀察不同應力下CFO磁滯伸縮效應的影響。

    This study employs sacrificial layer etching to facilitate the transfer of single crystal thin film technology. This transfer process allows for the preservation of the original characteristics of the single crystal thin film without causing any structural damage. CoFe_2 O_4(CFO) is a material exhibiting ferrimagnetism and magnetic anisotropy, making it widely utilized in magnetic sensors due to its hysteresis and stretching properties. In this study, we employed La_0.7 Sr_0.3 MnO_3(LSMO) as a sacrificial layer to enable the freestanding of CFO films on portable slides or any other flexible substrates. We investigated the surface and stress variations before and after the freestanding process. Subsequently, by applying different magnetic fields, we utilized the magnetic force microscope (MFM) to examine the changes in magnetic moment. Additionally, Raman spectroscopy was employed to analyze the effect of CFO hysteresis stretching under various stress conditions. This study establishes a standard fabrication process and demonstrates basic manipulation of the physical properties for the freestanding transformation of functional oxides.

    摘要 I Abstract Ⅱ 致謝 VII 表目錄 X 圖目錄 X 第一章 緒論 1 第二章 文獻回顧 2 2.1 CoFe_2 O_4 (CFO)特性 2 2.1.1 磁性來源簡介 2 2.1.2 超交換交互作用(superexchange interaction) 3 2.1.3 亞鐵磁性材料 4 2.1.4 鈷鐵氧磁體與反尖晶石結構 5 2.1.5 應力對於CFO磁性的影響 7 2.2 LSMO簡介 13 2.3 Freestanding簡介 16 第三章 實驗原理與方法 21 3.1 脈衝雷射沉積系統(PLD) 21 3.2 掃描式探針顯微術 25 3.3 磁力探測顯微術(MFM) 29 3.4 X射線分析(X-Ray) 30 3.4.1 X射線簡介 30 3.4.2 X射線繞射(X-Ray Diffraction,XRD)分析 30 3.5 拉曼光譜原理 32 3.6 微拉曼散射系統 33 3.7 拉曼散射的古典波動模型 34 第四章 實驗結果與討論 36 4.1 LSMO蝕刻 36 4.2 CFO/LSMO/STO樣品製備和量測 37 4.3 CFO在投影片上bending Raman 42 第五章 結論 44 參考文獻 45

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