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研究生: 林咨宇
Lin, Tzu-Yu
論文名稱: 超穎介面壓縮感知計算型光譜儀之背向入射量測與編碼器設計
Back-Side-Incidence Measurement and Encoder Design of a Metasurface-Based Compressed-Sensing Computational Spectrometer
指導教授: 林俊宏
Lin, Chun-Hung
學位類別: 碩士
Master
系所名稱: 智慧半導體及永續製造學院 - 關鍵材料學位學程
Program on Key Materials
論文出版年: 2026
畢業學年度: 114
語文別: 中文
論文頁數: 145
中文關鍵詞: 計算型光譜儀 、超穎介面 、壓縮感知 、過完備字典 、非相干性 、背向入射 、ADMM
外文關鍵詞: Computational spectrometer, Metasurface, Compressed sensing, Overcomplete dictionary, Incoherence
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  • 計算型光譜儀以一組具差異化光譜響應的編碼元件將入射光譜調製為編碼強度訊號,再藉由演算法反推原始光譜,本研究以超穎介面(metasurface)作為光譜編碼器並結合壓縮感知(compressed sensing)進行重建,在沿用本實驗室先前製程技術與超穎介面結構設計之基礎上,自量測架構、量測矩陣可信度、過完備字典與重建演算法四個面向對系統進行系統性改進與驗證,並以非相干性為準則設計新一代超穎介面編碼器。在量測架構上,改採背向入射以抑制高階繞射所致之單元間串擾,實測影像與嚴格耦合波分析法(RCWA)模擬皆證實高階繞射受有效抑制,而各單元之有效編碼響應完整保留;實驗量測矩陣與模擬高度一致,並以四種LED光源驗證前向一致性。在光譜重建上,本研究依據相干性理論設計三組過完備高斯原子字典,其中,全域相干性一致字典Ψ3於重建保真度與表示稀疏度均不劣於其餘二者之前提下,具備最佳之計算效率;於求解器比較中,Woodbury矩陣求逆引理將ADMM之單步成本壓至與FISTA同一數量級,其更低的迭代次數因而轉化為約13倍更短之線上運算時間,故選定「Ψ3字典搭配ADMM」作為線上重建組合。最後,針對硬體相干性偏高之瓶頸,本研究以最小化最壞情況相干為準則自候選單元庫選取64單元之新設計,將量測通道數由49提升至64,並使最壞情況相干改善約8 %、平均相干亦同步降低約6 %。然而,新編碼器目前僅以RCWA模擬建立並評估,其相干性改善尚待實體製作與端到端閉環驗證證實。

    A computational spectrometer uses encoding elements with different spectral responses to turn an incident spectrum into a set of coded intensity signals, and then recovers the original spectrum by computation. This keeps the device small while still giving good spectral resolution. This work uses a metasurface as the spectral encoder, together with compressed-sensing reconstruction. Using the same fabrication process and metasurface dimensions as an earlier study in our group, the system is improved and checked in four parts, namely the measurement setup, the reliability of the measurement matrix, the overcomplete dictionary, and the reconstruction algorithm, and a new encoder is designed using an incoherence criterion. For the setup, a back-side-incidence configuration is used to reduce the crosstalk between units caused by high-order diffraction; both measured images and rigorous coupled-wave analysis (RCWA) show that high-order diffraction is clearly reduced, while each unit's useful encoding response is fully kept. The experimental measurement matrix matches the simulation well, and forward consistency is confirmed with four LED sources. For reconstruction, three overcomplete Gaussian dictionaries are designed from coherence theory; the globally coherence-equalized dictionary attains the best computational efficiency while degrading neither reconstruction fidelity nor representation sparsity. In the solver comparison, ADMM needs far fewer iterations than FISTA, and the Woodbury identity holds its per-iteration cost at the FISTA level, making the online runtime about thirteen times shorter, so this dictionary with ADMM is chosen for online reconstruction. Finally, to deal with the high hardware coherence, a 64-unit design is chosen from a candidate library by minimizing the worst-case coherence, raising the number of channels from 49 to 64 and improving the worst-case coherence by about 8% and the average coherence by about 6%.

    摘要 i 致謝 ix 目錄 xi 表目錄 xiv 圖目錄 xvi 第一章 緒論 1 1.1 前言與研究動機 1 1.2 論文架構 3 第二章 理論原理與文獻回顧 4 2.1 計算型光譜儀概述 4 2.2 用於計算型光譜儀之超穎介面編碼器 6 2.3 背向入射對高階繞射之抑制機制 8 2.4 壓縮感知 10 2.4.1 稀疏性與過完備字典 10 2.4.2 非相干性 12 2.4.3 有限等距性質(Restricted Isometry Property, RIP) 14 2.4.4 稀疏優化演算法 16 第三章 研究方法 20 3.1 量測矩陣模擬與測量 20 3.1.1 超穎介面編碼器陣列的結構與製程 20 3.1.2 超穎介面編碼器穿透率光譜模擬 22 3.1.3 量測架構 24 3.1.4 自適應動態曝光演算法與控制策略 25 3.1.5 光強度數據擷取與預處理 27 3.1.6 實驗量測矩陣之建構 29 3.2 過完備字典設計 30 3.2.1 設計目標與高斯原子的選擇 30 3.2.2 高斯原子間的相關性 33 3.2.3 字典設計的演進 36 3.2.4 設計取捨與最終字典 40 3.3 壓縮感知重建光譜 41 3.4 新編碼器尺寸設計 45 第四章 實驗結果與討論 56 4.1 正向與背向入射量測配置之繞射特性對比 56 4.2 模擬量測矩陣與實驗量測矩陣之對比 58 4.2.1 量測矩陣之整體與逐單元對比 58 4.2.2 非相干性指標之對比 60 4.2.3 實驗量測矩陣之前向一致性驗證 62 4.3 壓縮感知重建結果討論 65 4.3.1 正則化參數之選定與穩健性 65 4.3.2 不同過完備字典之重建品質比較 69 4.3.3 不同演算法之重建結果比較 74 4.4 新編碼器選集之非相干性評估 77 第五章 結論與展望 110 5.1 結論 110 5.2 未來展望 113 第六章 參考文獻 116

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