本研究探討半導體製程中之晶圓封測有機廢水的生物可降解性，其中有機硫化合物二甲基亞碸(DMSO)為晶圓封測有機廢水的主要成分之ㄧ，故本研究亦針對DMSO探討好氧及厭氧狀態下的降解效率，並利用分子生物技術了解對應之降解微生物菌群，以建立處理DMSO 高有機廢液的最佳程序。在好氧條件下以薄膜生物反應器(MBR)測試DMSO降解效率，結果顯示高DMSO進流濃度會抑制DMSO的降解。當DMSO濃度從1000 mg/L 降至250 mg/L 時，DMSO去除效率由4 %上升至39 %。另外從好氧批次試驗結果顯示，在添加2 ppm Polymer、汙泥濃度約3000 mg/L時，需至少50小時能完全降解濃度250 mg/L之DMSO。在微生物部份，DMSO降解菌Hyphomicrobium sp.為最優勢菌種，由Hyphomicrobium sp.、Thiobacillus sp.兩種DMSO降解菌與氨氧化菌菌數產生相對變化，可以看出微生物族群對DMSO之降解產生的影響。於厭氧批次試驗部分，結果顯示不論採用何種汙泥來源均有食微比( S0/X0 )越小DMSO比降解速率越高的趨勢。且當DMSO濃度高於4000 mg/L時，不論是否提高污泥濃度，皆會對厭氧微生物造成抑制的現象。從厭氧微生物分析，結果顯示於本研究中，具有分解DMSO潛力之甲烷菌除了Methanomethylovorans外，還包含Methanosarcina、Methanolobus zinderi、Methanomethylovorans、Methanosaeta及一未知甲烷菌，尤其未知甲烷菌似乎有能力將DMS作為基質利用最後產生硫化氫氣體及甲烷氣。然而在厭氧批次試驗發現DMSO很容易還原成DMS並有累積的趨勢，但是經由密封之好氧批次試驗，DMS可以在好氧條件下轉換成硫酸鹽，去除了厭氧條件產生的臭味問題，但是好氧處理DMS濃度需控制在800 mg/L以下，避免高濃度之DMS會對好氧污泥造成抑制。因此本研究以厭氧及好氧結合之生物處理程序處理半導體製程中產生之高有廢液是可行的。然而在好氧條件下之最操作做條件為DMSO濃度為250 mg/L搭配50小時之水利停留時間；在厭氧條件下之最佳操作條件為DMSO濃度低於4000 mg/L。

In this study, the feasibility and optimal condition for biodegradation of organic wastewater provided by semiconductor industry was investigated. Dimethyl sulphoxide (DMSO) was the main component of the organic wastewater. Therefore, the DMSO biodegradation efficiency was discussed in this study by using membrane bioreactor (MBR) and several batch tests to treat the wastewater from semiconductor industry. Besides, molecular biotechnology was applied to understand the microbial population of DMSO biodegradation under aerobic and anaerobic conditions respectively. Under aerobic condition, MBR system was used to test the DMSO degradation efficiency. The results showed that high DMSO concentration would inhibit the DMSO degradation. When the inflow DMSO concentration decreased from 1000 mg/L to 250 mg/L, DMSO degradation efficiency increased from 4 % to 39 %. Furthermore, from the results of polymer addition batch test, it took at least 50 hours to fully degrade 250 mg/L of DMSO concentration. For the aerobic microbial part that Hyphomicrobium sp. was the most dominant species of DMSO-degrading bacteria. However, the influence of DMSO degradation efficiency might reflect on the changing abundance of Hyphomicrobium sp., Thiobacillus sp. and ammonia-oxidizing bacteria. Under anaerobic condition, the result showed lower S0/X0 ratio could get higher specific DMSO degradation rate. Furthermore, it was speculated that DMSO degradation was inhibited when DMSO concentration was higher than 4000 mg/L. For the anaerobic microbial part, it showed that not only Methanomethylovorans, but also Methanosarcina, Methanolobus zinderi, Methanomethylovorans, Methanosaeta and an unknown methanogens species were all contributed to anaerobic DMSO degradation. Particularly, unknown methane bacteria seemed to have the ability to use DMS as substrate. However, DMS accumulation could be solved via aerobic batch test with closed system. DMS transferred to sulfate under aerobic conditions effectively Hence, by combining anaerobic and aerobic biological treatment process to treat organic wastewater of semiconductor industry was a feasible way in this study. And the optimal operation under aerobic condition was DMSO concentration lower than 250 mg/L with 50 hours of HRT, and the optimal operation under anaerobic condition was DMSO concentration lower than 4000 mg/L.

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