本論文使用對稱型壓電元件(Symmetric Piezoelectric Element，SPE)設計三種不同的振動模態，並整合其三種振動模態，設計一結構簡單、體積小且可載動大體積元件的多軸度微型致動器。此多軸度微型致動器其結構包括四片相互垂直的對稱型壓電元件、微型推動扣件(Microdriving Parts)、導電彈簧與圓球轉子。在驅動控制上，以單晶片8051設計其驅動電路，當切換對稱型壓電元件不同電極表面之驅動電壓時，單軸度微型致動器即會產生不同的振動模態，使微型推動扣件推動圓球轉子於X、Y、Z各軸轉動。由實驗結果顯示，當驅動電壓為30Vpp時，圓球轉子於X、Y與Z軸之順時鐘轉動之驅動頻率分別為223.4kHz、223.2kHz、225kHz，其轉速分別可達到50rpm、52rpm、180rpm，且驅動電壓愈大，轉速也愈快；而Duty Cycle在50%時效率最高，且各軸轉速以50%為對稱軸成對稱關係；由磁吸式負載特性量測設備得知，對於相同重量之圓球轉子而言，當直徑愈大時，轉速愈高；對於相同直徑大小之圓球轉子而言，當重量愈大時，轉速愈低，而圓球轉子之最大轉矩為8.06mNm。最後，本研究將此多軸度微型致動器應用於微型追日系統與眼球定位系統，經實驗初步驗證其具備適用性。

The thesis presents a novel PZT-type multi-degree-of-freedom (multi- DOF) microactuator using symmetric piezoelectric element (SPE) with three resonances modal. It is not only fabricated with simple structure but also can drive a great spherical rotor. The PZT-type multi-DOF microactuator consists of four rectangular SPE, microdriving parts, and spherical rotor. In the research, three kinds of different resonances modal is applied in the PZT-type multi-DOF microactuator to rotated spherical rotor via microdriving parts. The experimental results obtain that the rotation speed of spherical rotor is reached 50rpm, 52rpm, and 180rpm around the X-axis, Y-axis and Z-axis clockwise rotation, when the input voltage is 30Vpp and the resonant frequency at 223.4 kHz, 223.2 kHz, and 225 kHz, respectively. Besides, the load characteristics are measured using the magnetic force system. For the result of measurement, when the spherical rotor diameter is invariable, the loads and speeds are inverse proportion, when the spherical rotor load is invariable, the diameters and speeds are direct proportion and the maximum torque is 8.06mNm. Finally, the multi-DOF microactuator has been estimated in various applications, such as micro sun-tracking system and eyeball-like system.

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