本論文利用混合式溶膠凝膠法製備Pb(Zr0.52Ti0.48)1-xNbxO3壓電膜並應用於MEMS懸臂樑型加速規，透過將壓電粉末與溶膠凝膠溶液混合，提升單層塗佈的厚度，藉由摻雜不同比例的Nb，探討壓電厚膜對於XRD、EDS、SEM、AFM、εr、tanδ、P-E、d33之影響，並找出最佳的材料參數應用於製作懸臂樑型加速規上，且透過數學模擬分析、ANSYS模擬與實際量測，比較懸臂樑型加速規之共振頻率差異，同時實際應用於硬碟之故障監測。
本研究發現藉由摻雜不同比例的Nb會使得厚膜結晶特性與微結構的改變，進而影響其電特性的表現，因此將探討其背後的機制與理論，最後製備出特性為:在頻率1kHz下介電常數εr 1750、介電損耗tanδ 0.063，殘餘極化量Pr 58μC/cm2，壓電係數d33 133pm/V之壓電厚膜。
在元件端探討數學模擬、ANSYS軟體模擬與實際量測共振頻之差異，最後製作出懸臂樑型加速規之共振頻率為200Hz，靈敏度16.79mV/g，同時實際應用於伺服器硬碟之監測。

In this study, a hybrid sol-gel method was used to fabricate Pb(Zr0.52Ti0.48)1-xNbxO3(PNZT) piezoelectric thick films. By preparing sol-gel solutions with different Nb concentrations(x=0 - 4%) and mixing them with PZT-5A piezoelectric powders, therefore, the microstructure and electrical properties is improved. The X-ray diffraction (XRD) and scanning electron microscope (SEM) results showed that PNZT films with 2% Nb-doped exhibited highly crystallinity and dense surface. The maximum dielectric constant, piezoelectric coefficient d33 of 133(pm/V) and remnant polarization value of 58(μC/cm2) were obtained in 2% Nb-dopants. These data are much better than the published results. Roughness and dielectric loss were also improved significantly with 2% Nb dopants. Then the best material parameters to be used in the fabrication of cantilever beam accelerometer. Piezoelectric electro-mechanical system (MEMS) cantilever beam accelerometers were then designed, simulated and fabricated on Si substrates via photolithography methods. And through mathematical theory, ANSYS simulation and actual measurement, the difference in resonance frequency of the proposed devices was compared. Finally, a cantilever beam accelerometer is applied for the server hard-drive fault detection.

[1] H. Kopetz, "Real-Time Systems: Design Principles for Distributed Embedded Applications", Springer Science, vol., no. pp. 307-322,2011.
[2] G. J. O. S. Patrick, and K. Lars Munch, "A piezoelectric triaxial accelerometer", Journal of Micromechanics and Microengineering, vol. 6, no. pp. 131,1996.
[3] A. V. Shirinov , and W. K. Schomburg, "Pressure sensor from a PVDF film", Sensors and Actuators, A: Physical, vol. 142, no. 1, pp. 48-55,2008.
[4] K. I. Park et al., "Piezoelectric BaTiO(3) thin film nanogenerator on plastic substrates", Nano Lett, vol. 10, no. 12, pp. 4939-4943,2010.
[5] P. Jegatheesan , and N. V. Giridharan, "Enhanced electrical properties of PZT thick films prepared by sol-gel technique through step-by-step crystallization process", Journal of Materials Science: Materials in Electronics, vol. 23, no. 5, pp. 1103-1107,2012.
[6] O. Auciello , and A. I. Kingon, in 8th IEEE International Symposium on Applications of Ferroelectrics, ISAF 1992, August 30, 1992 - September 2, 1992. (Institute of Electrical and Electronics Engineers Inc., Greenville, SC, United states, 1992), pp. 320-331.
[7] W. G. Lee , and S. I. Woo, "Preparation and characterization of PZT ferroelectric thin films by plasma enhanced metallorganic chemical vapor deposition", Integrated Ferroelectrics, vol. 9, no. 1-3, pp. 21-29,1995.
[8] M. Keshavarzi , and J. Yavand Hasani, "Design and optimization of fully differential capacitive MEMS accelerometer based on surface micromachining", Microsystem Technologies, vol. 25, no. 4, pp. 1369-1377,2018.
[9] A. Albarbar , S. Mekid , A. Starr , and R. Pietruszkiewicz, "Suitability of MEMS accelerometers for condition monitoring: An experimental study", Sensors, vol. 8, no. 2, pp. 784-799,2008.
[10] P.Curie, "Bull.Soc.Min.de France", vol., no. pp. 90,1880.
[11] W.G.Hankel, "Abh.sachs", vol., no. pp. 457,1881.
[12] 吳郎, "電子陶瓷-壓電", 全欣科技圖書, vol. 7, no. pp. 7-74,1994.
[13] 朱建國，孫小松, "電子與光電子材料", 北京: 國防工業出版社, vol., no. pp.,2007.
[14] a. D. T. F.Seitz, "Solid State Physics", vol. 7, no. pp.,1958.
[15] A. M. Badr , H. A. Elshaikh , and I. M. Ashraf, "Impacts of Temperature and Frequency on the Dielectric Properties for Insight into the Nature of the Charge Transports in the Tl2S Layered Single Crystals", Journal of Modern Physics, vol. 02, no. 01, pp. 12-25,2011.
[16] L. L. Hench , and J. K. West, "Principles of Electronic Ceramics", vol., no. pp.,1990.
[17] M. L.Thompson, "On the Material Properties and Constitutive Equations of Piezoelectric Poly Vinylidene Fluoride (PVDF)", Drexel University Doctor of Philosophy, vol., no. pp.,2002.
[18] Y. Liao, "Practical Electron Microscopy and Database", Springer Science, vol., no. pp.,2007.
[19] Z.-J. Wang , I. Karibe , L. J. Yan , H. Kokawa , and R. Maeda, "Effect of Zr/Ti ratio in targets on electrical properties of lead zirconate titanate thin films derived by pulsed laser deposition on template layer", Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 41, no. 11 B, pp. 6658-6663,2002.
[20] S. Trolier-Mckinstry , and P. Muralt, "Thin film piezoelectrics for MEMS", Journal of Electroceramics, vol. 12, no. 1-2, pp. 7-17,2004.
[21] S. Yang et al., "Large magnetostriction from morphotropic phase boundary in ferromagnets", Physical Review Letters, vol. 104, no. 19, pp.,2010.
[22] Q.-M. Wang , Z. Yang , F. Li , and P. Smolinski, "Analysis of thin film piezoelectric microaccelerometer using analytical and finite element modeling", Sensors and Actuators A: Physical, vol. 113, no. 1, pp. 1-11,2004.
[23] C. Wu , Y. Luo , Q. Peng , W. Luo , and W. Zhang, "Manufacture of large area porous PZT thick films and pyroelectric detectors based on screen-printing technology", Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, vol. 40, no. 7, pp. 1225-1229,2011.
[24] C. Galassi , E. Roncari , C. Capiani , and P. Pinasco, "PZT-based Suspensions for Tape Casting", Journal of the European Ceramic Society, vol. 17, no. 2-3, pp. 367-371,1997.
[25] D. A. Barrow , T. E. Petroff , R. P. Tandon , and M. Sayer, "Characterization of thick lead zirconate titanate films fabricated using a new sol gel based process", Journal of Applied Physics, vol. 81, no. 2, pp. 876-876,1997.
[26] B. Matthes , G. Tomandl , and G. Werner, "Characterization of PZT thin films prepared by a modified sol-gel method", Journal of the European Ceramic Society, vol. 19, no. 6-7, pp. 1387-1389,1999.
[27] A. L. Kholkin et al., "PZT-based piezoelectric composites via a modified sol-gel route", Journal of the European Ceramic Society, vol. 21, no. 10-11, pp. 1535-1538,2001.
[28] Q. Q. Zhang et al., "High frequency broadband PZT thick film ultrasonic transducers for medical imaging applications", Ultrasonics, vol. 44, no. SUPPL., pp. e711-e715,2006.
[29] Z. Wang , W. Zhu , C. Zhao , and O. K. Tan, in Advanced Electronic-ceramic Materials. Proceedings of the 8th IUMRS-ICEM 2002, June 10, 2002 - June 14, 2002. (Elsevier Ltd, Xi'an, China, 2003), vol. 99, pp. 56-62.
[30] D. Wu et al., "Dielectric and piezoelectric properties of PZT composite thick films with variable solution to powder ratios", Journal of the American Ceramic Society, vol. 92, no. 6, pp. 1276-1279,2009.
[31] A. Sachdeva , and R. P. Tandon, "Effect of sol composition on dielectric and ferroelectric properties of PZT composite films", Ceramics International, vol. 38, no. 2, pp. 1331-1339,2012.
[32] S. Dutta , A. A. Jeyaseelan , and S. Sruthi, "Low-temperature processing of PZT thick film by seeding and high-energy ball milling and studies on electrical properties", Journal of Electronic Materials, vol. 42, no. 12, pp. 3524-3528,2013.
[33] W. Zhou , J. He , H. Yu , X. He , and P. Peng, "Analytical study of temperature coefficients of bulk MEMS capacitive accelerometers operating in closed-loop mode", Sensors and Actuators, A: Physical, vol. 290, no. pp. 239-247,2019.
[34] M. Keshavarzi , and J. Yavand Hasani, "Design and optimization of fully differential capacitive MEMS accelerometer based on surface micromachining", Microsystem Technologies, vol. 25, no. 4, pp. 1369-1377,2019.
[35] J. Wang , T. Wang , and H. Guo, in 16th Annual Conference and 5th International Conference on Chinese Society of Micro-Nano Technology, CSMNT 2014, August 31, 2014 - September 3, 2014. (Trans Tech Publications Ltd, Chengdu, China, 2015), vol. 645-646, pp. 841-846.
[36] J. H. Kim et al., "Fabrication process of PZT piezoelectric cantilever unimorphs using surface micromachining", Integrated Ferroelectrics, vol. 15, no. 1 -4 pt 2, pp. 325-332,1997.
[37] A. Lei et al., in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. (Institute of Electrical and Electronics Engineers Inc., 2011), pp. 125-128.
[38] K. Kunz , P. Enoksson , and G. Stemme, "Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors", Sensors and Actuators, A: Physical, vol. 92, no. 1-3, pp. 156-160,2001.
[39] Q.-M. Wang , Z. Yang , F. Li , and P. Smolinski, "Analysis of thin film piezoelectric microaccelerometer using analytical and finite element modeling", Sensors and Actuators, A: Physical, vol. 113, no. 1, pp. 1-11,2004.
[40] Q. Zou , W. Tan , E. S. Kim , and G. E. Loeb, "Single- and triaxis piezoelectric-bimorph accelerometers", Journal of Microelectromechanical Systems, vol. 17, no. 1, pp. 45-57,2008.
[41] C. C. Hindrichsen et al., "Triaxial MEMS accelerometer with screen printed PZT thick film", Journal of Electroceramics, vol. 25, no. 2-4, pp. 108-115,2010.
[42] L.-P. Wang et al., "Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers", Journal of Microelectromechanical Systems, vol. 12, no. 4, pp. 433-439,2003.
[43] H. G. Yu et al., "Lead zirconate titanate MEMS accelerometer using interdigitated electrodes", Sensors and Actuators, A: Physical, vol. 107, no. 1, pp. 26-35,2003.
[44] C. C. Hindrichsen , J. Larsen , E. V. Thomsen , K. Hansen , and R. Lou-Moller, in IEEE Sensors 2009 Conference - SENSORS 2009, October 25, 2009 - October 28, 2009. (Institute of Electrical and Electronics Engineers Inc., Christchurch, New zealand, 2009), pp. 475-478.
[45] G. Yugandhar , G. Venkateswara Rao , and K. Srinivasa Rao, "Modeling and Simulation of Piezoelectric MEMS Sensor", Materials Today: Proceedings, vol. 2, no. 4-5, pp. 1595-1602,2015.
[46] B. Yaghootkar , S. Azimi , and B. Bahreyni, in 15th IEEE Sensors Conference, SENSORS 2016, October 30, 2016 - November 2, 2016. (Institute of Electrical and Electronics Engineers Inc., Orlando, FL, United states, 2016), vol. 0, pp. IEEE; IEEE Sensors Council.
[47] D. L. DeVoe , and A. P. Pisano, "Surface micromachined piezoelectric accelerometers (PiXLs)", Journal of Microelectromechanical Systems, vol. 10, no. 2, pp. 180-186,2001.
[48] N. N. Hewa-Kasakarage , D. Kim , M. L. Kuntzman , and N. A. Hall, "Micromachined Piezoelectric Accelerometers via Epitaxial Silicon Cantilevers and Bulk Silicon Proof Masses", Journal of Microelectromechanical Systems, vol. 22, no. 6, pp. 1438-1446,2013.
[49] C. J. Brinker , and G. W. Scherer, Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing. Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing (Elsevier Inc., 2013), pp. 1-908.
[50] R. O. J. Matyas, P. Slobodian, and Z. Spitalsky, "Flexible microstrip antenna based on graphene/styrene-isoprene-styrene copolymer composite thin layer deposited on PET substrate for VOC detection", Tomas Bata University Centre of Polymer Systems, vol., no. pp.,2016.
[51] M. Teodorescu, Research on Biomimetics Applicability in Textile Products - Thesis summary. (2012).
[52] L. Weng , X. Bao , and K. Sagoe-Crentsil, "Effect of acetylacetone on the preparation of PZT materials in sol-gel processing", Materials Science and Engineering B: Solid-State Materials for Advanced Technology, vol. 96, no. 3, pp. 307-312,2002.
[53] C.-C. Tsai et al., "Study of Pb(Zr0.52Ti0.48)O3 microelectromechanical system piezoelectric accelerometers for health monitoring of mechanical motors", Journal of the American Ceramic Society, vol. 102, no. 7, pp. 4056-4066,2019.
[54] M. W. Hooker, "Properties of PZT-based piezoelectric ceramics between-150 and 250 C", vol., no. pp.,1998.
[55] "“http://www.icdd.com/,”", The International Centre for Diffraction Data., vol., no. pp.
[56] Q. Li et al., "Effect of Nb doping on crystalline orientation, electric and fatigue properties of PZT thin films prepared by sol-gel process", Journal of Ceramic Science and Technology, vol. 8, no. 4, pp. 519-524,2017.
[57] W. Xu et al., "Effect of Gd doping on crystalline orientation, structural and electric properties of PZT thin films prepared by Sol-Gel methods", Integrated Ferroelectrics, vol. 183, no. 1, pp. 100-109,2017.
[58] Q. Li et al., "Effect of neodymium substitution on crystalline orientation, microstructure and electric properties of sol-gel derived PZT thin films", Ceramics International, vol. 44, no. 7, pp. 7709-7715,2018.
[59] H. Sun et al., "The effect of Mn/Nb doping on dielectric and ferroelectric properties of PZT thin films prepared by solgel process", Journal of Sol-Gel Science and Technology, vol. 74, no. 2, pp. 378-386,2015.
[60] J.-C. Yu , J.-X. Wu , T. H. Yeh , and C.-C. Chou, in 6th Asian Meeting on Ferroelectrics, AMF-6, August 2, 2008 - August 6, 2008. (Taylor and Francis Inc., Taipei, Taiwan, 2009), vol. 383, pp. 127-132.
[61] R. Singh , S. Chandra , S. Sharma , A. K. Tripathi , and T. C. Goel. (Institute of Electrical and Electronics Engineers Inc., 2004), vol. 11, pp. 264-270.
[62] J. Wang et al., "Structure and ferroelectric behavior of Cu-doped PbTiO3 thin film deposited on FTO by sol-gel technique", Journal of Alloys and Compounds, vol. 739, no. pp. 700-704,2018.
[63] Y. J. Yu , F. P. Wang , H. L. W. Chan , and L. C. Zhao, "Highly (100)-oriented Eu-doped PZT thin films on sol-gel derived (100)-textured LaNiO3/Si substrates", Applied Physics A: Materials Science and Processing, vol. 78, no. 5, pp. 733-736,2004.
[64] S. K. Pandey et al., "Growth and characterization of Sm3+-substituted PZT thin films", Physica B: Condensed Matter, vol. 388, no. 1-2, pp. 404-411,2007.
[65] H. Gao , X. Qiao , Q. Liu , M. Shao , and H. Wang, paper presented at the Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 2019.
[66] J.-y. W. Rui-hua HAN, Ma-hui XU, Hang GUO*, "DESIGN OF A TRI-AXIAL MICRO PIEZOELECTRIC ACCELEROMETER", Symposium on Piezoelectricity, Acoustic waves, and Device Applications, vol., no. pp.,2016.
[67] R. W. L.-P. Wang, Q. Zhou, S. Trolier-McKinstry, and R. J. Davis, "Wet-etch Patterning of Lead Zirconate Titanate (PZT) Thick Films for Microelectromechanical Systems (MEMS) Applic", Materials Research Society, vol. 657, no. pp.,2001.