本篇論文以掃描式熱探針微影技術在側磨光纖上定點合成銀奈米粒子，搭配上連接光纖的光譜儀，可在繪製銀奈米粒子圖形的過程中即時量測其表面電漿子共振性質。 將光學級的聚對苯二甲酸乙二醇酯和銀的前趨物-三氟醋酸銀調配出之溶液，利用旋轉塗布的方式在玻片上成膜，並藉由在室溫下的溶劑退火，使得聚對苯二甲酸乙二醇酯薄膜的耐熱性及機械強度提升。製備完成的薄膜將直接被撕下並轉貼上側磨光纖。掃描熱探針技術是利用掃描式探針顯微鏡搭配奈米級的熱探針，可局部加熱以觸發銀前驅物的還原，形成銀奈米粒子。在另一方面，異丙苯過氧化氫，一種過氧化物的高能物質亦被添加至薄膜中，在掃描熱微影過程中能提供額外的熱源。實驗結果顯示高能物質輔助掃描式熱探針微影技術能將聚對苯二甲酸乙二醇酯薄膜內的銀奈米粒子還原溫度降低至200 oC。 在掃描式熱探針微影技術中，於一個加熱點產生的為嵌入並散佈於聚對苯二甲酸乙二醇酯薄膜中的銀奈米粒子叢集。在繪製圖形的過程中，吸收光譜可被連接上側磨光纖的光譜儀即時量測。在二維點陣列的繪製過程中，隨著陣列點間距的縮短，銀奈米粒子的表面電漿共振發生些微紅位移，此現象來自於兩個相鄰的銀奈米粒子叢集間引發的表面電漿子耦合，進而改變其表面電漿子共振特性。 本研究成功展示了即時量測由掃描式熱探針微影技術合成出的銀奈米粒子之表面電漿子性質。在微影過程中，電漿子耦合的發生在即時量測下被完整記錄。

Surface plasmon resonance (SPR) of silver nanoparticles in-situ synthesized by the scanning thermal lithography (SThL) was monitored in real time via the fiber-based spectrometer. Optical-transparent poly(ethylene terephthalate) (PET) preloaded with silver precursor, silver trifluoroacetate, was spin-coated on a slide, followed by the solvent annealing process to improve the thermal resistance and mechanical strength. Obtained PET layer was cut and transferred to a side-polished optical fiber (SPOF). SThL involved the scanning probe microscope equipped with a nano-scaled thermal probe capable of a localized heating that triggers the silver nanoparticle formation from the precursor. Furthermore, an energetic, cumene hydroperoxide, was added to provide extra joule heat during the SThL. As a result, the energetic-assisted SThL produced and patterned the silver nanoparticles in the PET layer at the temperature as low as 200oC. SThL stamping produced a cluster of silver nanoparticles embedded in the PET layer. During the SThL, the absorption spectra were monitored in real time by a spectrometer connected to the SPOF. A SThL with 2-dimensional array patterns revealed a slight SPR red-shift as the stamping distance was shortened. In such case, two stamping clusters encouraged the SPR coupling that altered the SPR characteristics. This work successfully demonstrated the real time monitoring of SThL-synthesized silver nanoparticles, as well as their SPR profiles during the SThL fabrication with or without plasmonic coupling.

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