| 研究生: |
廖柏翰 Liao, Po-Han |
|---|---|
| 論文名稱: |
原子層沉積氧化鋁與柑橘果膠混成材料之記憶體與仿突觸功能研究 Resistive Memory and Synaptic Functionality of ALD-Al₂O₃/Citrus Pectin Hybrids |
| 指導教授: |
張御琦
Chang, Yu-Chi |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 工程科學系 Department of Engineering Science |
| 論文出版年: | 2025 |
| 畢業學年度: | 113 |
| 語文別: | 英文 |
| 論文頁數: | 120 |
| 中文關鍵詞: | 柑橘果膠 、電阻式記憶體 、原子層沉積 、突觸可塑性 、氧化鋁 |
| 外文關鍵詞: | Citrus Pectin, Resistive Memory, Atomic Layer Deposition, Synaptic Plasticity, Aluminum Oxide |
| 相關次數: | 點閱:16 下載:0 |
| 分享至: |
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隨著人工智慧與物聯網技術的迅速發展,高效能且低功耗的記憶體元件需求日益增加。可變電阻式記憶體(RRAM)因具備高速運作、非揮發性及高儲存密度等特性,成為新一代記憶體技術的重要候選。本研究以可生物降解的柑橘果膠為基材,製備柔性RRAM元件,並結合原子層沉積(ALD)技術沉積氧化鋁(Al₂O₃)薄膜,以提升元件的電性穩定性與降低漏電流。實驗結果顯示,經Al₂O₃修飾後的元件展現超過10⁴的高開關比,具備100次以上的重複切換穩定性,以及長達10⁴秒的資料保持特性。此外,該裝置可成功模擬生物突觸行為,呈現明顯的短期與長期突觸可塑性。此研究證明柑橘果膠/氧化鋁複合結構不僅能作為高性能、環保記憶體材料,亦具潛力應用於神經形態運算與類腦計算領域,為永續電子元件發展提供新契機。
With the rapid advancement of artificial intelligence and the Internet of Things, there is a growing demand for high-performance and low-power memory devices. Resistive random-access memory (RRAM) has emerged as a promising candidate due to its high-speed operation, nonvolatility, and high storage density. In this study, biodegradable citrus pectin was utilized to fabricate flexible RRAM devices, and aluminum oxide (Al₂O₃) films were deposited by atomic layer deposition (ALD) to enhance device stability and suppress leakage current. The resulting devices exhibited an ON/OFF ratio exceeding 10⁴, stable switching endurance over 100 cycles, and data retention up to 10⁴ seconds. Moreover, the devices successfully mimicked biological synaptic behaviors, showing distinct short-term and long-term synaptic plasticity. These findings demonstrate that the citrus pectin/Al₂O₃ hybrid structure not only serves as an eco-friendly, high-performance memory material but also holds great potential for applications in neuromorphic and brain-inspired computing, offering new opportunities for sustainable electronics.
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校內:2026-12-31公開