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研究生: 陳令妮
Chen, Lin-ni
論文名稱: PTCDI-C8H17薄膜之磊晶機制
Growth Model of N-Octyl Perylene Diimide Films
指導教授: 周維揚
Chou, Wei-Yang
學位類別: 碩士
Master
系所名稱: 理學院 - 光電科學與工程研究所
Institute of Electro-Optical Science and Engineering
論文出版年: 2009
畢業學年度: 97
語文別: 中文
論文頁數: 74
中文關鍵詞: 吸收光譜有機薄膜電晶體有機駢苯衍生物原子力顯微鏡X-ray 繞射光激螢光光譜表面能
外文關鍵詞: organic thin film transistor, absorption spectroscopy, organic perylene derivatives, X-ray diffraction, atomic force microscope, surface energy, photoluminescence
相關次數: 點閱:109下載:18
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  • 本論文利用具有潛力的有機駢苯衍生物N,N'-dioctyl-3,4,9,10- perylene tetracarboxylic diimide (PTCDI-C8H17)為主體,進行各種薄膜分析,利用不同厚度之PTCDI-C8H17薄膜成長在兩種不同的基板,基板上有介電層二氧化矽與聚醯亞胺上,探討不同厚度之PTCDI-C8H17分子的成長與結晶狀況。
    實驗中藉由X-ray繞射、原子力顯微鏡與表面能等分析來了解PTCDI-C8H17分子的堆疊情形,且利用光激螢光光譜、吸收光譜的分析探討PTCDI-C8H17能隙隨不同磊晶厚度的變化,並製作出頂部接觸型的N型有機薄膜電晶體,進一步的了解PTCDI-C8H17薄膜的結構與元件電特性的關係。
    透過X-ray繞射、原子力顯微鏡與表面能的分析結果可以發現PTCDI-C8H17薄膜初期成長時受到基板與有機半導體層表面能不匹配所造成的應力影響,其堆疊出來的結晶較零亂,而當薄膜逐漸成形時PTCDI-C8H17分子只受本身分子作用力影響,其結晶度比較高。從光激螢光光譜、吸收光譜的分析中,可以發現當厚度增加時分子間作用力變大,使得PTCDI-C8H17薄膜的能隙變小。從以上分析可以發現PTCDI-C8H17分子在PI上有較佳的成長環境,最後在載子遷移率的分析也確實驗證出PTCDI-C8H17薄膜成長在PI上時有較佳的表現。
    依薄膜分析的結果,發現當厚度增加時,越有利載子的傳輸,但是從有機薄膜電晶體元件整體分析的結果並不是如此,PTCDI-C8H17薄膜成長在二氧化矽或聚醯亞胺上時,載子遷移率在厚度為50 nm時是最佳的,這可能是由於隨著PTCDI-C8H17薄膜厚度增加時,元件的串聯電阻逐漸增加使得元件整體的載子遷移率下降。

    Organic semiconductor- N, N'-dioctyl-3, 4, 9, 10- perylene tetracarboxylic diimide (PTCDI-C8H17) has potential in the research of flexible electronics by analyzing the characteristics of its thin film. Through different thicknesses of PTCDI-C8H17 thin film deposited on polyimide (PI) or silicon dioxide dielectric surface, the growth mechanism and crystal structure of the PTCDI-C8H17 films were discussed. The stack process of PTCDI-C8H17 molecules on the dielectric could be obtained by X-ray diffraction, atomic force microscopy, and analysis of surface. Through the analyses of photoluminescence and absorption spectroscopy, we could investigate the change of the energy gap of the PTCDI-C8H17 film with different thicknesses. Finally, top-contact organic thin film transistors (OTFTs) were fabricated by using PTCDI-C8H17 as active layers to understand further the relationship between the structure of the active layer and the electrical characteristics of the device.
    The early stage of growth of PTCDI-C8H17 thin film could be found through analyses of X-ray diffraction, atomic force microscopy, and surface energy. Poor crystallization of PTCDI-C8H17 in early stage of growth was due to the surface energy mismatch between substrate and organic semiconductor layer. Furthermore, the crystalline of PTCDI-C8H17 molecules on PI was better than that on SiO2 from the analyses of photoluminescence and absorption spectroscopy; therefore, the better performance for PTCDI-C8H17–base OTFT using the PI as dielectric could be expected. According to the results of the variation of the PTCDI-C8H17 thin film, the optimal thickness of the PTCDI-C8H17 thin film was 50 nm to achieve a high performance OTFT. The series resistance of PTCDI-C8H17 thin film transistor increased to decline the field-effect mobility of the OTFT when the increase of the PTCDI-C8H17 film thickness.

    摘要 I Abstract III 目錄 V 表目錄 VIII 圖目錄 IX 致謝 XII 第一章簡介 1 1.1簡介 1 1.2 研究動機 2 第二章 原理 5 2.1有機薄膜的成長機制 5 2.2 有機薄膜電晶體傳輸機制 6 2.2.1 有機半導體載子傳輸機制 6 2.2.2 有機薄膜電晶體基本公式及特性 7 第三章 有機薄膜與電晶體製程及分析方法 10 3.1 有機駢苯衍生物PTCDI-C8H17之合成與分析 10 3.1.1 合成原理 10 3.1.2 有機駢苯衍生物PTCDI-C8H17配置流程 10 3.1.3 自行合成的有機駢苯衍生物PTCDI-C8H17之檢測分析 11 3.2 薄膜特性分析 12 3.2.1 X-Ray繞射量測系統 12 3.2.2 原子力顯微鏡量測系統 13 3.2.3 吸收光譜 14 3.2.4 光激螢光光譜 15 3.2.5 表面能量測系統 16 3.3物理氣相沉積蒸鍍系統與製程 17 3.4 電性分析 18 第四章 不同的介電層表面對PTCDI-C8H17薄膜磊晶之影響 25 4.1 前言 25 4.2 樣品製作 25 4.3 X-Ray 繞射分析 26 4.4 AFM分析 29 4.5表面能分析 31 4.6 光激螢光光譜分析 32 4.7 吸收光譜 34 4.8 不同厚度的PTCDI-C8H17薄膜之元件特性分析 37 4.8.1 元件製作 37 4.8.2電性分析 38 4.9 綜合結論 40 第五章結論與未來展望 71 5.1 結論 71 5.2 未來展望 71 參考文獻 73

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