本論文目的是設計、製造並控制一套原子力顯微鏡系統。在奈米領域，原子力顯微鏡是套基礎且強勁的顯像儀器，然而，它的顯像速度較慢，因而限制了它的應用範圍。為改善原子力顯微鏡的顯像速度，需增加垂直於X-Y 掃描平面的Z 軸頻寬。在本研究中，經由對各子系統頻寬的分析，我們以堆疊式壓電致動器為X、Y、Z 三軸致動器，設計出原子力顯微鏡的硬體，並用 PI 控制器與 H∞ 控制器進行反饋控制，以實現Z 軸致動器對樣品形貌的追蹤。實驗結果證實，此自製的原子力顯微鏡可達奈米級的解析度，且較商用產品而言，具有較高的Z 軸頻寬。

The purpose of this thesis is to design, manufacture and control an atomic force microscope. In the field of nanotechnology, an atomic force microscope is a fundamental
and powerful tool for imaging samples. However, it is usually operated at relatively low speeds and that limits its applications. To improve the operation speed of an atomic force microscope, high bandwidth in z-axis (i.e., the axis perpendicular to the scanning xy-plane) is essential. In this research, we analyze the bandwidth of each subsystem, and design the hardware of an atomic force microscope with stack piezo actuators in three-axes(x-,y-,z-axis). Furthermore, PI and H1 feedback controllers are implemented for motion control in z-axis to track topography of the sample. Experimental results show that the homemade atomic force microscope can achieve nanometer resolution, and has higher bandwidth than commercial products in z-axis.

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