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研究生：	杜承翰 Du, Cheng-Han
論文名稱：	EUV光源中角向捏縮磁場之開發 Development of the magnetic field in a theta pinch in the EUV light source
指導教授：	張博宇 Chang, Po-Yu
學位類別：	碩士 Master
系所名稱：	理學院 - 太空與電漿科學研究所 Institute of Space and Plasma Sciences
論文出版年：	2022
畢業學年度：	110
語文別：	英文
論文頁數：	79
中文關鍵詞：	極紫外光、角向捏縮、荷姆霍茲線圈、脈衝功率系統、B點探針
外文關鍵詞：	extreme ultraviolet light, theta pinch, Helmholtz coil, pulsed power system, B-dot probe
相關次數：	點閱：126 下載：19
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極紫外光微影是半導體製程中最先進的技術之一，我們將透過角向捏縮的方式來壓縮加
熱電漿，使電漿的溫度到達約30 eV，因而輻射出極紫外光。在本論文中，我們使用荷姆霍茲線圈去產生角向捏縮所需的磁場。為了驅動荷姆霍茲線圈，我們使用實驗室中的脈衝功率系統，這系統能夠提供峰值達100 ∼ 200 kA、上升時間約為1.6 μs的大電流。荷姆霍茲線圈是由不鏽鋼所製成，線圈的截面積為一矩形，厚度為2.5 mm，線圈的內半徑和外半徑分別是5 mm 和15 mm。它的結構堅固，不會因大電流而損壞。根據線圈磁場的公式，理想的荷姆霍茲線圈能在中心處產生4.6∼11.6 T 的磁場。在模擬中，考量電流均勻分布在線圈的截面積中，則荷姆霍茲線圈在中心處產生10.1 T的磁場。最後，我們透過放電測試量測磁場。在荷姆霍茲線圈放電測試中，我們利用半徑為2.5 mm 的單匝線圈所製的B點探針(B-dot probe)，來測量荷姆霍茲線圈產生的磁場。首先，B點探針先透過自製的螺線管產生已知磁場進行校正。從實驗中，我們得到B點探針校正因子是41500±300(T/V·sec)。然後，我們使用RC積分器將B點探針的感應電壓積分得到待測的磁場。最後，我們量測得到荷姆霍茲線圈在中心點位置的磁場峰值為11.4±1.0 T。

Extreme ultraviolet (EUV) lithography is one of the most advanced technologies in semiconductor fabrication. We would like to heat the plasma using a theta pinch via compression heating. When the temperature of the plasma reaches about 30 eV, the plasma radiates EUV light. In this thesis, we used a Helmholtz coil to generate the magnetic field required for the theta pinch. In order to drive the theta pinch, we used a pulsed-power system in the laboratory, which can provide a high current with a peak of 100 ∼ 200 kA and a rise time of ∼ 1.6 μs. The Helmholtz coil is made of stainless steel. The cross section of the coil is rectangular with 2.5 mm in thickness. The inner and the outer radius of the coil are 5 mm and 15 mm, respectively. The structure of the coil is strong and is not damaged by the high current. According to the theoretical formula , the ideal Helmholtz coil can generate a magnetic field in the range of 4.6 to 11.6 T at the center. In the simulation, current is uniformly distributed in the cross section, the ideal Helmholtz coil produced a magnetic field of 10.1 T at the center. Finally, we experimentally
measured the magnetic field through discharge test. In the Helmholtz coil discharge tests, we used a B-dot probe to measure the magnetic field generated by the Helmholtz coil. The B-dot probe was a single-turn coil with a radius of 2.5 mm. It was first calibrated by an known magnetic field generated by a self-made solenoid. In experiments, we obtained that the calibration ratio Ccalib of the B-dot probe was 41500±300 (T/V·sec). In addition, we used the RC integrator to integrate the induced voltage of the B-dot probe to obtain the magnetic field. Finally, the measured peak magnetic field generated by the Helmholtz coil at the center was
11.4±1.0 T.

摘要 i
Abstract ii
致謝 iii
Contents iv
List of Figures vi
List of Tables x

1 Introduction 1
   1.1 Extreme ultraviolet (EUV) lithography  1
   1.2 The conventional EUV source 2
   1.3 The typical theta-pinch experiment  5
   1.4 The pulsed-power system  6
   1.5 Helmholtz coil  7
   1.6 Our proposed EUV light source and the goal of the thesis  8

2 The pulsed-power system 10
   2.1 The structure of the pulsed-power system 10
   2.2 The recalibration of the Rogowski coil 12
   2.3 The new optical trigger-pulse generator 17
       2.3.1 The operation of the new optical trigger-pulse generator 19
       2.3.2 The design of the new optical trigger-pulse generator 20
       2.3.3 The test of the new optical trigger-pulse generator 22
       2.3.4 The new optical trigger-pulse generator in experiments 24
   2.4 Summary 25

3 Helmholtz coil 26
   3.1 The design of our Helmholtz coil 26
   3.2 The theoretical magnetic field 29
   3.3 The simulated magnetic field 30
       3.3.1 Benchmark 30
       3.3.2 Simulated magnetic field of the actual Helmholtz coil 32
   3.4 Summary 33

4 The B-dot probe 34
   4.1 The design of the B-dot probe 35
   4.2 Calibration of the B-dot probe 37
       4.2.1 The magnetic field generated from a solenoid 37
       4.2.2 Calibration of the B-dot probe in a high-pulsed current 40
       4.2.3 The passive RC integrator 43
   4.3 Summary 45

5 Helmholtz coil discharge tests 46
   5.1 Discharge in atmosphere 46
   5.2 Discharge under low vacuum 49
   5.3 Discharge under high vacuum 53
   5.4 The magnetic field of the Helmholtz coil 54
       5.4.1 The magnetic field at center of the Helmholtz coil 55
       5.4.2 The magnetic field at 10 mm away from the Helmholtz coil center 58
       5.4.3 The magnetic field at 15 mm away from the Helmholtz coil 59
   5.5 Summary 60

6 Future works 62

7 Summary 63

8 Reference 65

9 Appendix 67
                                    

[1]http://www.semiconductorchiller.com/manufacturing-of-semiconductor/
[2]https://en.wikipedia.org/wiki/Moore%27s law
[3]https://case.ntu.edu.tw/blog/?p=33519
[4]https://finance.technews.tw/2019/01/25/euv-asml-2018/
[5]F.A.Ebrahim1, W. H. Gaber1, M. E. Abdel-kader1. Estimation of the Current Sheath Dynamics
and Magnetic Field for Theta Pinch by Snow Plow Model Simulation.
[6]http://capst.ncku.edu.tw/PGS/index.php/pulsed-power-generator/
[7]https://en.wikipedia.org/wiki/Helmholtz coil
[8]V.Borisov, A. Eltzov, A. Ivanov, O. Khristoforov, Yu. Kirykhin, A. Vinokhodov, V. Vodchits,V. Mishhenko, and A. Prokofiev. Discharge produced plasma source for EUV lithography.
[9]https://aip.scitation.org/doi/full/10.1063/5.0079450
[10]http://capst.ncku.edu.tw/PGS/index.php/pulsed-power-generator/
[11]Jia-Kai Liu. Study of the gas puff in the EUV light source using a theta pinch. Master
thesis. National Cheng Kung University Institute of Space and Plasma Sciences, 2022.
[12]https://aip.scitation.org/doi/full/10.1063/5.0079450
[13]https://www.quantel-laser.com/en/products/item/q-smart-850-mj-.html
[14]Po-Yu Chang,1, * Yen-Cheng Lin,1 Ming-Hsiang Kuo,1. One-kilojoule Pulsed-Power Generator for Imploding Conical-Wire Arrays.
[15]Ming-Hsiang Kuo. Study the plasma disk generated from the head-on collisions of two plasma jets. Master thesis. National Cheng Kung University Institute of Space and Plasma Sciences, 2022.
[16]https://www.comsol.com/comsol-multiphysics
[17]I.H.HUTCHINSON. Principles of Plasma Diagnostics Second edition. Massachusetts Institute of Technology.
[18]Sayak Bose, Manjit Kaur, Kshitish K. Barada, Joydeep Ghosh, Prabal K. Chattopadhyay and Rabindranath Pal. Understanding the working of a B-dot probe.
[19]https://en.wikipedia.org/wiki/Twisted pair.
[20]https://file.yzimgs.com/365081/2011050521414051.pdf. WT10A 數字特斯拉計
[21]Ming-Hsiang Kuo. Study the plasma disk generated from the head-on collisions of two plasma jets. Master thesis. National Cheng Kung University Institute of Space and Plasma Sciences, 2022.
[22]Jun-Yun Cheng. 109 Annual Report.

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