殘留振動的存在，影響了撓性機件傳輸運動之精度定位，增加達成工作目標所需要的時間，並降低其工作效率。減少殘留振動的方法有閉迴路設計的回授控制以及開迴路設的輸入修正法。回授控制具有抵抗干擾與提供系統強健性的能力，但往往需與系統妥協而影響控制系統性能表現。而輸入修正法提供了一個有效且快速的減振方法，能有效地縮短安定時間及抑制殘留振動，但輸入修正法屬於廣義的開迴路控制，對外界干擾無抵抗能力，無法完全消除其造成的殘留振動。於本文中，建立了一雙自由度長距離移動系統之模型，分別利用輸入修正法與回授控制系統以抑制於移動過程中造成的殘留振動。依系統本身的性能限制設計輸入修正法，模擬分析和實驗結果顯示，線性輸入修正法能有效地抑制殘留振動，且可根據其所需求之條件選用不用的輸入修正模式，於加/減速過程所殘留下的Undershoot/Overshoot最大為未修正前的二分之一。回授控制方面，我們分別設計了頻率響應控制與全狀態回授控制，其結果顯示，全狀態回授能夠快速且有效將系統振動抑制至0。本文研究結果將有助於應用在需要快速且穩定的長距離移動之相關應用。

Residual vibration control is crucial for numerous applications in long-range precision transportation applications such as gantry cranes and wafer steppers. These systems usually require a fast maneuver with small motion-induced vibration amplitudes. In order to achieve this goal, residual vibration resulting from structure motion must be analyzed and suppressed. In this work, a two-degree of freedom pendulum system mounted on a linear servomotor was designed and fabricated to simulate the motion of cranes and wafer steppers in high speed rest-to-rest maneuver, both open-loop command shaping and closed-loop multivariable control techniques were utilized and developed to evaluate their performance in suppression of residual vibration induced by transportation. Four command shaping schemes, namely: 2-pulse ZV, 3-pulse ZV, ZVD, and 2´3 MIS ZVD, were developed and implemented. Their performance, such as overshoot reduction, settling time, and robustness against system parameter variables, were characterized and compared. The results indicate that the ZV scheme could achieve the fastest settling time, while the 2´3 MIS ZVD approach could yield a minimal undershoot/overshoot. The robustness of these shapers was investigated through simulations and experiments and the results shows that the ZVD and the 2x3 MIS ZVD shapers are most capable to resist dynamic parameter variations than others methods. Two feedback control schemes: i.e., frequency control for SISO systems and full state feedback control for MIMO systems were also developed and applied to the system in conjunction with laser sensors and electromagnetic actuators. The simulation and experimental results indicated that the full state feedback control scheme, in together with a full-state observer, has better capability to yield a better performance. In addition, in comparison with control system design based on linearized dynamics, the feedback linearization approach could effectively compensate the nonlinearity of electromagnets. Finally, by comparing the robustness, overshoot reduction, settling time, and power consumption of these command shaping and feedback control schemes, it was found that the full state feedback control has the best performance but it also demand the most power consumption during maneuvers. In summary, both simulation and experimental results have successfully demonstrated that both command shaping and feedback control approaches are feasible for vibration reduction and suitable for the mechatronics applications which requires high quality long-range transportations.

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