| 研究生: |
施嘉玲 Shih, Chia-Ling |
|---|---|
| 論文名稱: |
類鑽碳鍍層應用於3C產品之磨耗分析 Wear Analysis of the Diamond-Like Carbon Coating for 3C Product |
| 指導教授: |
潘文峰
Pan, Wen-Feng |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 工程科學系 Department of Engineering Science |
| 論文出版年: | 2012 |
| 畢業學年度: | 100 |
| 語文別: | 中文 |
| 論文頁數: | 75 |
| 中文關鍵詞: | 類鑽碳 、電漿輔助化學氣相沈積法 、磨耗壽命 |
| 外文關鍵詞: | Diamond-Like Carbon, PECVD, wear life |
| 相關次數: | 點閱:60 下載:0 |
| 分享至: |
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本研究以乙炔為主要的反應氣體,利用電漿輔助化學氣相沈積法製作類鑽碳薄膜披覆於SUS304不鏽鋼上,而所沉積的不同膜厚類鑽碳分別為: 1、2、2.5 μm。實驗以RCA耐磨測試機、洛氏硬度實驗機、維克氏硬度機、SRV往復式磨耗試驗機和顯微拉曼光譜儀進行耐磨耗性、附著度、硬度、摩擦係數、磨耗壽命及拉曼I(D)/I(G)比的試驗,並且利用環境掃描式電子顯微鏡(ESEM)來觀察SUS304不鏽鋼磨耗後之情況。實驗結果發現,鍍有類鑽碳膜比傳統銀或黑烤漆的SUS304不鏽鋼有較低的摩擦係數、更高的耐磨耗性、更高的附著度及較佳的磨耗壽命。此外,由於2mm類鑽碳膜的石墨化現象較明顯,而使得鍍膜產生潤滑的效果,因而造成該膜厚的磨耗壽命比2.5mm鑽碳膜厚的磨耗壽命更高。
In this research, by using the C2H2 as the reaction gas, the plasma enhanced chemical vapor deposition is used to coat the diamond-like carboz on SUS304 stainless steel. Three thicknesses of the diamond-like carbon film were considered to be 1, 2 and 2.5 mm. The RCA wear resistance machine, Rockwell hardness testing machine, Vickers hardness testing machine, SRV reciprocating wear testing machine and microscopes Raman spectrometer are used to conduct the wear resistance, adhesion, coefficient of friction, wear life and I(D)/I(G) ratio tests. It can be seen from the experimental result that the SUS304 stainless steel with the diamond-like carbon coating has the lower coefficient of friction, higher wear resistance, higher adhesion and better wear life. In addition, due to sever graphitization of the 2mm diamond-like carbon film, this causes the effect of lubrication. Therefore, the wear life is higher than that of the 2.5mm diamond-like carbon film.
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校內:2017-08-09公開