本文主要以有限元素法模擬短脈衝雷射引發薄膜剝離技術，對於其作用機制做探討，研究模擬分為兩部分，第一部分為雷射回彈壓力導致薄膜剝離之分析，在此部分採用單純力學模式來計算電漿回彈壓力造成體波於試件中傳遞之現象，並計算出薄膜之剝離範圍。另一部分為雷射熱應力導致薄膜剝離分析，考慮隨時間變化之高斯分佈熱源照射於具熱彈塑性行為之材料表面，以熱-機非耦合分析(Uncoupled thermal-mechanical analysis)的模式來模擬熱應力造成之體波傳遞現象，進而求出薄膜剝離之範圍。在實驗中，本研究使用Nd-YAG雷射，加熱於施行單面電鍍之底材表面，且在底材表面加一玻璃作為覆蓋物質，使試件薄膜表面產生剝離之現象，且分別針對試件底材厚度與薄膜厚度等製程參數進行討論，並與模擬計算結果做比較。
　　研究結果顯示，底材厚度愈小、薄膜厚度愈大其薄膜愈容易剝離，而底材厚度愈大、薄膜厚度愈大其薄膜剝離範圍愈大。

　　The object of this thesis is to analyze the laser spallation on thin film substrate with the finite element method. The thesis was divided into two parts: the thin film spallation problem induced by plasma recoil pressure and thermal stress.

　　Nd-YAG laser with Gaussian mode intensity was used as a pulse energy source to heat the 304 stainless steel plates electroplated with copper film. The laser beam was focused on steel surface to generate bulk wave to spall the copper film in this study. In the analysis of thin film spallation induced by plasma recoil pressure, the propagation of elastic-plastic stress wave was simulated numerically. The non-linear finite element method software, ABAQUS, was used to simulate the stress wave problem for a mechanical system in two-dimensional domain. The stress distribution, stress of thin film surface and interface during the laser spallation process were calculated.

　　In the analysis of thin film spallation induced by thermal stress, the propagation of thermal stress wave was simulated numerically. The non-linear finite element method software, ABAQUS, was used to simulate the stress wave problem for an uncoupled thermal- mechanical system in two-dimensional domain. The stress distribution, stress of thin film surface and interface during the laser spallation process were also calculated. The process parameters affecting the thin film spallation were also investigated in both parts by FEM simulation.

　　It was shown that the thinner substrate or the thicker film made the film spallation easier. The spallation diameter increases with the thickness of substrate and film.

[1] Vossen, J.L., Adhesion measurement of thin films, thick films and bulk coatings, ASTM STP640, pp.122-133, 1978
[2] Gupta, V., Argon, A.S., Parks, D.M., and Cornie, J.A., Measurment of interface strength by a laser spallation technique, J. Mech. Phys. Solids, Vol. 40(1). pp.141-180, 1992
[3] Yuan, J., and Gupta, V., Measurement of interface strength by the modified laser spallation technique. I. Experiment and simulation of the spallation process, J. Appl. Phys. Vol.74(4). Pp.2388-2396, 1993
[4] Yuan, J., and Gupta, V., Measurement of interface strength by the modified laser spallation technique. II. Application to metal/ceramic interface, J. Appl. Phys. Vol.74(4). Pp.2397-2404, 1993
[5] Yuan, J., Gupta, V., and Prion, P. Measurement of interface strength by the modified laser spallation technique. III. Experiment optimization of the stress pulse, J. Appl. Phys. Vol.74(4). Pp.2405-2410, 1993
[6] Wang, J., Weaver, R.L., and Sottos, R.N., A parametric study of laser thin film spallation, Exp. Mech., Vol.42(1), pp.74-83, 2002
[7] Scruby, C.B., and Drain, L.E., Laser Ultrasonics: techniques and applications,(Adam Hilger, New York,1990)pp.243-285
[8] Hoffman, C.G., Laser-target interactions, J. Appl. Phys., Vol. 45, pp. 2125-2128, 1974
[9] Fairand, B.P., Clauer, A.H., Jung, R.G., and Wilcox, B.A., Quantitative assessment of laser-induced stress waves generated at confined surfaces, Appl. Phys. Lett. Vol. 25, pp. 431-433, 1974
[10] Kowalewicz, R., and Eberl, E., Shadow Photography of Laser-Driven Shock Waves in air, IEEE Transaction on plasma science, Vol. 24(1), pp.43-44, 1996
[11] Couturier, S., Resseguier, de T. Hallouin, M. and Romain, J. P., Shock profile induced by short laser pulses, J. Appl. Phys., Vol. 79(12), pp. 9338-9342, 1996
[12] Fox, J.A. Effect of water and paint coatings on laser-irradiated targets. Appl. Phys. Lett, 15 May 1974, Vol.24,No. 10, pp. 461-464.
[13] Peyre, P., Scherpereel, X., Berthe, L., and Fabbro, R., Current trends in laser shock processing. Surface Engineering, 1998, Vol. 14 No. 5,pp. 377-380.
[14] Montross, CS., Florea, V., Swain, MV., Influence of coating on subsurface mechanical properties of laser peened 2011-T3 aluminum, Journal of Material Science, Vol. 36, pp.1801-1807, 2001
[15] Peyre, P., and Fabbro, R., Laser shock processing: a review of the physics and applications, Optical and Quantum Electronics Vol. 27, pp. 1213-1229, 1995
[16] David, J.,and Cheeke N., Fundamentals and applications of Ultrasonic waves(2002)p77-124
[17] Fabbro, R., Fournier, J., Ballard, P., Devaux, D., and Virmont, J., Pysical study of laser-produced plasma in confined geometry, J. Appl. Phys, Vol. 68 No.2, pp. 775-784,1990
[18] ABAQUS User’s Manual Volume II, H.K.S. Inc., Pawtuckett, RI, 1998.
[19] Kogawa, H., Futakawa, M., Isikura, S., Kikuchi, K., Hino, R., and Eto M., Inertia effect on thermal shock by laser beam shot, International Journal of Impact Engineering, Vol. 25, pp17-28, 2001
[20] Chen, W.F., and Han, D.J., Plasticity for Structural Engineers, Springer-Verlag New York Inc., 1988.
[21] Youtsos, A. G., Kiriakopoulos, M., and Timke, Th., Experimental and theoretical/numerical investigations of thin films bonding strength, Theoretical and Applied Fracture Mechanics, Vol.31 pp.47-59, 1999
[22] Getting Started with ABAQUS/Explicit, H.K.S. Inc., Pawtuckett, RI, 1998.
[23] Zhang, W., and Yao, Y.L., Improvement of laser induced residual stress distribution via shock waves, Section E-ICALEO 2000, pp.183-190
[24] Morrell, R., Hand book of properties of technical & engineering ceramics, National physical laboratory, pp.70-96, 1985
[25] Ueda, Y., Iida, K., Saito, m. and Okamoto, A., Finite element model and residual stress calculation for multi-pass welded joint between a sheet metal and the penetrating pipe, Modeling of Casting, Welding and Advanced Solidification Processes-V, pp.219-227, 1991.
[26] Zhou, M., Zeng, D. Y., Kan, J. P., Zang, Y. K., and Cai, L., Finite element simulation of film spallation process induced by the pulsed laser peening, J. Appl. Phys., Vol.94, No.5, pp.2968-2975, 2003
[27] Lee, L.H., Fundamentals of adhesion, Webster, New York Inc,pp.363-371, 1992
[28] Meyers, M.A., Dynamic Behavior of Materials, John Wiley & sons, Inc. pp.323-330, 1994
[29] Lee, J.H., and Burger, C.P., Finite element modeling of laser generation lamb waves, Computers & Structures. Vol. 54,No. 3, pp.499-514, 1995.
[30] Ready, J. F., Industrial Applications of Lasers, Academic Press, New York, pp.338-343, 1978
[31] 洪志憲, 運用網格重建技術於大型結構焊接之研究, 成功大學機械工程研究所碩士論文, 1995.
[32] Ready, J. F., Effects of High-Power Laser Radiation, Academic Press, New York, pp.70-74, 1971.
[33] 賴耿陽, 電鍍技術, 南臺, pp.192, 1986