本研究以有限元素法模擬奈米壓痕負載-深度曲線，將模擬曲線和奈米壓痕實驗所得負載-深度曲線及文獻相互比較，並配合類神經網路系統歸納模擬，代入奈米壓痕實驗曲線特性，得到逆運算結果。使用電腦軟體ANSYS分別模擬在平面應力、平面應變、軸對稱、三維四種情況下施加不同負荷時對應之壓痕深度，分析過程中必須考慮接觸效應。在實驗上，利用國立成功大學微奈米中心MTS機台進行測試。測試材料選取標準試片fused silica，壓痕器則選擇Berkovich及圓錐兩種形狀，並設定各項邊界條件及環境因素，得到兩種形狀下施加不同負荷時對應之壓痕深度。
最後藉由MATLAB軟體將有限元素模擬結果進行類神經網路訓練，將逆算結果和理論公式所得之楊氏係數相互比較，進而改善奈米壓痕研究方法。
關鍵字：有限元素法、奈米壓痕、類神經網路、平面應力、平面應變、軸對稱。

This research uses finite element method’s simulation and nano-indentation’s experiment parameters of loading and depth. It takes neural network’s method to induce inverse computational conclusion of Young’s modulus. In finite element method’s simulation, the problem is non-linear analysis. By computer analytic software of ANSYS, it simulates three different conditions, including plane stress model, plane strain model, and axial symmetric model. They are used to analyze the depth in different loadings. The contact effect must be considered in analytic process. Therefore, the indenter moves single axial as rigid target surface and the specimen is linear-elastic contact surface at simulation setting. In nano-indentation experiment, Center for Micro/Nano Science and Technology of National Cheng Kung University (N.C.K.U.) provides nano-indentation test. We must choose the standard specimen, fused silica, in test material and use the indenter which has Berkovich and conical shapes. During the process, we set boundary conditions and environmental factors. Then, the results get loading-depth curve at different shapes of indenter.
Finally, the literatures, the finite element simulation, and the experiment results demonstrate that they have analogical values. By neural network training, the results and the Young’s modulus compare each other and may improve nano-indentation’s research method.
Keywords：finite element method, nano-indentation, neural network, plane stress, plane strain, axial symmetric

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