膜片箝制(Patch Clamp)技術，是電生理學中研究離子通道機制最成熟完備的一項工具，傳統膜片箝制方式是使用玻璃吸管(pipette)移動到要紀錄的細胞上。此方式可得到正確且精準的資訊，但卻需要純熟的操作技術，且相當耗費時間導致只能得到少量的紀錄資訊。電壓箝制(Voltage clamp)則是另外一種量測離子通道的方式，給予一定程度的電壓來量測細胞膜間的離子電流進出，藉此可量測細胞的動作電位(action potential)。

　　本論文提出以軟微影(Soft lithography)與蝕刻技術，在矽晶片上製作細胞平台與孔洞，以代替傳統膜片箝制的玻璃吸管來進行電壓箝制實驗，至今已成功地以矽晶片細胞平台黏取細胞和以ICP(感應耦合電漿離子蝕刻)蝕刻出矽晶片的微小孔洞。本研究驗證了此製程的可行性，期望可藉由此晶片量測細胞的離子通道，能自動化且即時地得知細胞的生理現象，且節省人力與時間，並提高紀錄的資訊產量。

　　Patch clamp is a well-developed lelectrophysiological recording technique used to study ion channel function and regulation. The conventional method of performing patch clamp technique employs a glass micropipette onto the cell by manual manipulation. Despite this technique is extremely sensitive and information-rich, but requires a highly-skilled operator and is limited in throughput. Voltage clamp that determine the behavior of the ion channel conductances responsible for the generation of the action potential is the another method to record the flow of ionic current across the cell membrance. The method is held a constant membrane potential while the ionic current flowing through the membrane is measured.

　　The thesis presents cell-platforms and etcing pores on silicon by using soft lithography and etching technique insteading of conventional glass micropipette recording method. we successfully demonstrated practicability of the process by the cells adhered on the platform and the etching pores on the silicon chip by using ICP. The less laborious manipulation、time saving and high sampling throughput will be expected .In the future, we can automatically real time controlled and changed in response to the cell’s physiologic characteristics measured by ionic channel activities.

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