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研究生: 楊子萱
Yang, Zih-Syuan
論文名稱: 廣義惠更斯源於寬頻電漿子光學元件之開發與應用
Generalized Huygens' source for broadband plasmonic components
指導教授: 吳品頡
Wu, Pin-Chieh
學位類別: 碩士
Master
系所名稱: 理學院 - 光電科學與工程學系
Department of Photonics
論文出版年: 2022
畢業學年度: 110
語文別: 中文
論文頁數: 66
中文關鍵詞: 電漿子超穎介面廣義惠更斯源混合模態光束偏轉器結構交錯式超穎介面偏振調控超穎全像
外文關鍵詞: Plasmonic metasurface, Generalized Huygens' source, Plasmonic hybridization, Interleaved metasurface, Full-polarized meta-hologram
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  • 電漿子超穎介面具有利用簡單的製程即可達成在次波長尺度下調控光特性的優勢。然而,光與金屬結構交互作用後易產生熱損耗,這使得電漿子超穎介面在高效率穿透式元件的應用上受到了極大的限制。此外,由於大多數的共振模態只能在特定波長下被激發,因此也造成了電漿子超穎介面頻寬窄的缺點。為了克服電漿子超穎介面低效率與窄頻的問題,本研究藉由將廣義惠更斯源的概念引入巴比涅形式的混合式雙層共振器以提高電漿子超穎介面的效率,並且利用如同光柵的多重耦合共振器結構引發混合模態生成,實現於近紅外波段下寬頻高效率的電漿子超穎介面,其中的光束偏轉器應用在模擬的效率與頻寬分別達到32.6%與30.8%,大大突破了已發表文獻中電漿子超穎介面的效能。另外,我們也將混合式雙層結構的設計延伸至可見光波段應用,配合結構交錯式超穎介面的方法達到可見光下寬頻之超穎全像,並且藉由幾何相位法進一步調控全像影像之偏振,實現全彩之偏振調控超穎全像的應用。我們的研究利用簡單的製程步驟即可獲得寬頻高效率之穿透式電漿子超穎元件,為先進光電設備與微型元件的開發提供了良好的發展平台。

    Plasmonic metasurfaces are capable of manipulating the light properties at sub-wavelength scale with the advantage of easy fabrication. However, metallic nanostructures severely suffer from the intrinsic optical loss that highly limits the application of plasmonic metasurfaces in transmission. In addition, the resonant modes can usually be excited at certain frequencies, which brings about the narrow working bandwidth. In this work, we incorporate the concept of generalized Huygens' source and plasmonic hybridization with hybrid bilayer multi-resonators to realize highly-transmissive broadband plasmonic metasurfaces in the near-infrared range. The developed beam deflector achieves anomalous refraction with 32.6% optical efficiency and a 30.8% bandwidth of the central wavelength in simulation, which is a state-of-the-art performance in the community to the best of our knowledge. Moreover, based on an interleaved metasurface, we accomplish a broadband meta-hologram with full-polarization channels in visible window via geometric-phase hybrid bilayer single-resonators. Our work features a simple fabrication process to achieve high-performance broadband metasurfaces in transmission, which can be promisingly extended to the development of low-profile optical components and integrated optoelectronic devices.

    口試合格證明 I 中文摘要 II 英文摘要 III 致謝 VIII 目錄 X 圖目錄 XII 第一章 緒論 1 1.1前言 1 1.2超穎介面簡介 1 1.2.1發展背景與特性 1 1.2.2電漿子與介電質超穎介面 3 1.2.3電漿子混合模態 6 1.2.4巴比涅原理 10 1.3廣義Kerker效應簡介 12 1.3.1惠更斯超穎介面 12 1.3.2 Kerker條件 13 1.4研究目的 16 第二章 實驗方法 18 2.1前言 18 2.2數值模擬計算 18 2.3製程儀器與方法 21 2.3.1負光阻ma-N系列 21 2.3.2電子束微影系統 23 2.3.3熱蒸鍍機 26 2.3.4樣品製程流程 27 2.4光路架設與量測 32 第三章 結果分析與討論 36 3.1前言 36 3.2寬頻高效率電漿子超穎介面於近紅外光之應用 36 3.2.1多重耦合共振器之設計與分析 36 3.2.2光束偏轉超穎介面 40 3.2.3單元結構內部耦合行為於光調控能力之影響與討論 45 3.3寬頻高效率電漿子超穎介面於可見光之應用 48 3.3.1結構交錯式寬頻超穎介面簡介 48 3.3.2單元結構設計 50 3.3.3偏振調控之超穎全像 52 3.3.4多頻道超穎全像 56 第四章 結論與未來展望 62 參考文獻 63

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