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研究生： 曾俊達
Tseng, Jun-Da
論文名稱： 基於空間光調變器之貝索光束整形與強度調變於超快雷射加工應用
Spatial Light Modulator-based Bessel Beam Shaping and Intensity Modulation for Ultrafast Laser Processing Applications
指導教授： 張家源
Chang, Chia-Yuan
學位類別： 碩士
Master
系所名稱： 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年： 2026
畢業學年度： 114
語文別： 中文
論文頁數： 136
中文關鍵詞： 空間光調變器 、Bessel 光束 、軸向強度調變 、超快雷射加工
外文關鍵詞： spatial light modulator, Bessel beam, axial intensity modulation, ultrafast laser processing
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    • Bessel光束具有長焦深與近似非繞射傳播之特性，常應用於光束整形與超快雷射加工。傳統上多以錐形透鏡(axicon)產生Bessel光束，雖具有高雷射承受能力與較佳能量轉換效率，但光束參數通常受限於元件本身，缺乏調整彈性。因此本研究以空間光調變器(spatial light modulator，SLM)為核心，利用其可載入不同相位圖，建構可整合光束整形量測與超快雷射加工系統。
    本研究首先利用線性錐形透鏡相位圖進行系統測試。由於正入射架構存在能量損耗與高功率下元件損壞等問題，本研究改採斜入射架構，使系統效率由約為16%提升至約53%。結果顯示，在小角度斜入射架構可降低光型變形問題，其中心主瓣直徑之RMSE (root-mean-square error)約在7 μm內。
    在光束整形方面，本研究將線性錐形透鏡相位延伸為五階多項式錐形透鏡相位，並結合基因演算法(genetic algorithm，GA)與無約束非線性最小化演算法(unconstrained nonlinear minimization algorithm，UNMA)進行相位係數最佳化。實驗結果顯示，Bessel光束之軸向強度均勻化、漸升以及漸降分布之RMSE皆小於4%，表示此方法可有效調變Bessel光束之軸向強度分布。
    最後，本研究將不同軸向強度分布之Bessel光束應用於BF33玻璃加工。由蝕刻後正面、背面與側面顯微影像可觀察到，不同軸向強度分布會形成不同位置與輪廓之孔洞，顯示軸向強度調變會影響超快雷射加工結果。

    Bessel beams exhibit long depth of focus and quasi-nondiffracting propagation characteristics, and are therefore commonly applied in beam shaping and ultrafast laser processing. Conventionally, Bessel beams are generated using axicons, which offer high laser power tolerance and favorable energy conversion efficiency. However, the beam parameters are usually limited by the optical element itself, resulting in limited flexibility for beam adjustment. Therefore, this study focuses on the use of a spatial light modulator (SLM) which can generate different profiles by loading different phase patterns, to construct a system that integrates beam shaping measurement with ultrafast laser processing. In this study, a linear axicon phase pattern was first used for system testing. Since the normal-incidence configuration caused beam profiles stretching, energy loss, and optical component damage under high-power laser operation, the system was modified into an oblique-incidence configure. As a result, the system efficiency was increased from approximately 16% to approximately 53%. The result show that the small-angle oblique-incidence configuration can reduce beam profile distortion and improve the overall system efficiency. For beam shaping, the linear axicon phase was extended to a fifth-order polynomial axicon phase, and genetic algorithm (GA) combined with an unconstrained nonlinear minimization algorithm (UNMA) was used to optimized the phase coefficient. The experimental results show that the RMSE values of the uniform, increasing, and decreasing axial intensity distributions of the Bessel beam were all less than 4%, indicating that the proposed method can effectively modulate the axial intensity distribution of Bessel beams. Finally, Bessel beams with different axial intensity distributions were applied to BF33 (BOROFLOAT® 33) glass processing. Microscopic observations of the front, back, and side surfaces after etching showed that different axial intensity distribution produced holes with different positions and profiles, indicating that axial intensity modulation affects the results of ultrafast laser processing.

    摘要 i Extended Abstract ii 誌謝 viii 目錄 ix 表目錄 xii 圖目錄 xiii 第一章 緒論 1 1-1 前言 1 1-2 文獻回顧 2 1-3 研究動機 4 1-4 論文架構 5 第二章 高功率超快雷射機台系統 7 2-1 高功率超快雷射機台系統架構 7 2-1-1 機台內部光路架構 7 2-1-2 雷射控制系統 9 2-2 雷射平均功率與脈衝能量 13 2-3 高功率超快雷射機台加工系統與校正 15 2-4 高功率超快雷射機台脈衝寬度調整 16 第三章 空間相位調變 20 3-1 SLM工作原理 20 3-1-1 液晶特性 20 3-1-2 液晶分子排列種類 22 3-1-3 SLM原理介紹 23 3-2 SLM規格介紹 25 3-3 SLM校正 27 3-3-1 SLM校正光路系統 28 3-3-2 SLM校正公式推導 30 3-3-3 SLM校正結果 33 第四章 Bessel光束設計與加工驗證 35 4-1 Bessel光束原理 36 4-1-1 理想零階Bessel光束之電場與強度分布 37 4-1-2 有限孔徑Bessel光束之菲涅爾繞射積分 39 4-1-3 穩相法近似之Bessel光束 42 4-2 Bessel光束之SLM相位分析 45 4-3 正入射系統架設 49 4-4 實驗與理論驗證 52 4-4-1 軸向強度分析 52 4-4-2 二維強度分析 56 4-4-3 實驗與討論 60 4-5 斜入射系統架設 62 4-6 實驗與理論驗證 64 4-6-1 軸向強度分析 64 4-7 Bessel光束軸向強度調變演算法 66 4-7-1 多項式相位函數 67 4-7-2 演算法流程 68 4-7-3 GA與UNMA最佳化參數設定 73 4-8 實驗與理論驗證 76 4-8-1 軸向強度均勻化 76 4-8-2 軸向強度漸升 79 4-8-3 軸向強度漸降 81 4-8-4 不同軸向強度分布之試片加工驗證 83 第五章 結論與未來展望 88 5-1 結果與討論 88 5-2 未來展望 90 參考文獻 94 附錄 98

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