隨科技之進步，在人力密集之高科技廠房皆逐漸轉型智能化、自動化來面對人口老化、人力短缺之問題，而OHT系統(Overhead Hoist Transfer)在高科技廠房被廣泛利用來進行物料之搬運，台灣積體電路製造公司(TSMC)之製程已朝2~3奈米邁進，隨先進製程線寬不斷縮小，微振動之影響將日益嚴重。
本研究建立實際尺寸之三維高科技廠房有限元素模型，並於一樓天花板建置OHT軌道系統，藉由調整「軌道不平整度」、「行走車速」及「樓板厚度」，並利用快速傅立葉轉換及1/3八音階倍頻法進行低頻(0~100Hz)之能量加總獲得樓板振動dB值，以了解一樓鋼筋混凝土層及二樓鋼構層之微振動受振反應特性。
本案例中OHT之微振動主要影響頻率在一樓鋼筋混凝土層為25Hz、二樓鋼構層為40~63Hz，降低軌道不整度、車速及增加密集柱支撐皆能減少微振動的產生，而樓板的厚薄則與振動量無正、負相關，僅與其自然振動頻率有關；總體而言OHT重量較輕而高科技廠房構件尺寸龐大，其行走產生之微振動並不會影響高階之先進製程。

This study is based on a three-dimensional finite element model of a high-tech fabrication plant, in which an OHT(Overhead Hoist Transfer) system has been mounted on the ceiling of the first floor. Adjusting factors of “railway irregularity”, “travel speed”, and “floor thickness” with the fast Fourier transform and the one third octave band spectrum method totaling low frequency (0~100Hz) energy to obtain the floor vibration dB value, we were able to observe the response characteristics of the micro vibrations of the reinforced concrete layer on the first floor and the steel layer on the second floor in the high-tech factory.
In this case, confirms that OHT’s micro-vibration mainly affects the frequency of 25Hz for the reinforced concrete layer on the first floor and 40~63Hz for the steel layer on the second floor. By decreasing “rail irregularity”, “travel speed” and increasing the density of columns in a given area, there may be lesser micro vibrations produced. The thickness of floors has no positive or negative correlation with the amount of vibration, but only related to its natural frequency. In conclusion, the OHT is lighter in weight and the high-tech components are large in size, micro vibrations caused by its walking will not affect the high-end advanced manufacturing process.

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