本論文主要的研究目的為探索垂直氣壓缸受不同負載力時，控制器於定位精度的表現。本文使用滑動模式控制器與負載補償器來控制在不同負載力下的垂直氣壓缸伺服定位控制系統，系統的負載力是藉著壓力控制來調變。由實驗結果可知，在各種不同的負載情況下，定位精度均可達100nm以內，由此可證明滑動模式控制器與負載補償器的可行性。

　　The objective in this thesis is trying to explore the precision performance in positioning by the controller of vertical pneumatic cylinder under vertical load. The experiment use sliding mode controller and load compensator to control the position of the vertical pneumatic cylinder under vertical load. Regarding the simulation of loading force, it can be accomplished by controlling the pressure of the pneumatic proportional valve. From the experimental results, the system can still reach the positioning accuracy of 100 nm under different load conditions. The feasibility of the sliding mode controller and the load compensator can be demonstrated by the experiment.

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