本研究以熱式催化劑化學氣相沉積法成長具定向性的奈米碳管，採純鐵薄膜作為催化劑分別比較以氫氣及氨氣作為熱處理氣體時對成長奈米碳管之影響。除比較兩者作為熱處理氣體對成長奈米碳管之影響外，藉改變氨氣濃度探討其對於奈米碳管成長行為及型態的影響。
　　實驗結果顯示以氫氣作為熱處理氣體時，反應氣體中氨氣濃度低時可獲得具高密度的碳管；隨著氨氣濃度增加則碳管漸漸失去定向性。以氨氣作為熱處理氣體時，反應氣體中的氨氣濃度對碳管密度的影響不明顯；隨著氨氣濃度增加碳管亦漸失去定向性。氨氣濃度增加，碳管在拉曼光譜上的D band 強度值和G band強度值比（ID/IG ratio）將隨之增加，顯示碳管結構隨氨氣濃度增加至一定濃度而出現較多缺陷。
　　從EELS分析結果可知氮原子進入碳管結構後，隨數量的增加將產生雙鍵的碳-氮鍵結而非氮原子數量少時的碳-氮單鍵，而雙鍵結構會使得原本具準直性的碳管開始產生皺折及彎曲。場發射電流量測結果顯示碳管之定向性對其有相當大的影響，較整齊排列的碳管將有較佳場發射性質，但密度過高則有相反效果。在溫度方面，低於600℃將無法獲得成長良好的碳管，品質方面亦無法達到可應用之要求。

　NH3 as a reaction gas had been profoundly used in various kind of process to synthesize carbon nanotube including plasma enhanced chemical vapor deposition (PE-CVD), microwave plasma enhanced chemical vapor deposition (MPE-CVD) and thermal chemical vapor deposition (thermal CVD) et al. Generally, the major effect of ammonia is to enhance the alignment of carbon naotubes but the mechanism of how NH3 promote such an important characteristic of carbon nanotube is still uncertain.
　In this experiment, ammonia is used as heat treatment gas and is compared with hydrogen gas. Also, under the same total flow rate but different carbon source concentration, it’s introduced in reaction gas with different concentration to mix with carbon source, acetylene. Fe thin film which acts as catalyst will crack into nano-scale particles after the heat treatment because of internal and thermal strength. Then, through the chemical vapor deposition in horizontal tube furnace with mixing reaction gas at 1atmosphere, carbon nanotubes with good alignment were thus obtained.
　SEM & TEM were used to analyze the microstructure of carbon nanotube and Raman spectroscopy was also used to analyze the quality of carbon nanotube. By adopting Field emission measurement of our laboratory, the field emission properties and the cycle-times test results were also acquired. Beside, EELS information of CNTs was collected during TEM observation.
　Results show that carbon nanotubes growing with NH3 heat treatment has better alignment than those growing with H2 heat treatment and the quality of carbon nanotubes become worse when the NH3 concentration in mixing reaction gas getting higher. In the mean while, the field emission properties of carbon nanotubes don’t have close relation with the quality of CNTs obviously and it seems the field emission properties were more likely affected by the alignment of carbon nanotubes. With increasing concentration of ammonia, more and more bamboo-structure appears in carbon nanotubes. In EELS results, we observed the K edge signal of N which come from the interaction between electron beam and π* orbital of the pyridine-like orbital. The K edge signal of N show the existence of N atoms in CNT’s structure and we suspect this is the reason why the CNT’s loss it’s alignment when the concentration of NH3 exceed 50%.
　By the theoretical analysis of Thermal Dynamics calculated by some research groups and our experimental results, this experiment gives the basic explanation of how ammonia affects the growth behavior of carbon nanotubes with different properties.

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