近年來，隨著奈米結構的製程日趨成熟，各種奈米元件的應用也漸漸增多。二氧化鈦材料因其化學結構穩定、光電特性佳和生物相容性佳等優良特性，常被用於我們日常生活當中。本論文利用水熱法製備二氧化鈦奈米結構應用於酸鹼感測器與非酵素型葡萄糖感測器兩種感測器元件，並利用熱退火和成長時間的改變，找出元件的最佳特性。
酸鹼感測器的部分，我們的量測結構為延伸式閘極場效電晶體(EGFET)，EGFET中的感測元件為FTO-玻璃基板上成長二氧化鈦奈米結構。首先，我們做退火前後的特性比較。我們發現退火後缺陷被修復導致元件電性變得更佳。接著，我們改變元件的成長時間。透過SEM分析，我們推斷成長時間為8小時的元件表面積最大，與我們量測結果相符。經過退火與成長時間的改變，我們得到敏感度47.73 mV/pH，r^2高達0.99的酸鹼感測器。
非酵素型葡萄糖感測器的部分，我們使用循環伏安法的三電極系統做為我們的量測設置。工作電極我們採用二氧化鈦奈米結構成長於金電極上，金電極由玻璃基板上先鍍上鉻當附著層，再鍍上金製成。第一個部分，我們使用不同的退火溫度處理二氧化鈦奈米結構，找出退火500度為我們的最佳參數。第二部分，我們改變二氧化鈦奈米結構的成長時間，得到成長時間6小時退火500度的最佳敏感度87.95 μA〖cm〗^(-2) 〖mM〗^(-1)。經過連續量測30次與連續量測10天的檢測，證明我們所做的葡萄糖感測器具備優異的性能。

Nowadays, with the maturity of nanostructure fabrication, the applications of nanostructure have gradually increased. Because of the characteristics of their stable chemical structure, good photoelectric properties and nice biocompatibility, TiO2 are often used in our daily life. In this study, the hydrothermal growth method was used to prepare TiO2 nanostructures for two kinds of sensor devices, pH sensor and non-enzyme glucose sensor. By changing the annealing temperature and growth time, the best fabrication parameters were found to achieve high sensitivity.
For pH sensor, extended gate field effect transistor (EGFET) was used as our measurement structure. The sensing membrane is TiO2 nanostructures grown on the FTO-glass substrate. First, the growth time was fixed at 4 hours, and we compared the TiO2 nanostructures with and without annealing. After annealed, the defects were repaired, which made the electrical properties of TiO2 nanostructures enhance. Then, we changed the growth time of TiO2 nanostructures. After SEM analysis, we assumed that the 8-hour growth TiO2 nanostructures had the biggest surface area, which is consistent with the results we measured. After changing the annealing temperature and growth time, we got the best sensitivity of 47.73 mV/pH of pH sensor and its r^2 is up to 0.99.
For non-enzymatic glucose sensor, the three electrode system of cyclic voltammetry is used as our experimental setup. TiO2 nanostructures grown on Au electrode is used as our working electrode. Au electrode was deposited by e-gun with Cr as adhesion layer for glass substrate. First part, we changed the annealing temperature and found that the annealing temperature of 500℃ is the best parameter. Second part, we changed the growth time of TiO2 nanostructures and found that 6-hour growth TiO2 nanostructures annealed at 500℃ has the best sensitivity of 87.95 μA〖cm〗^(-2) 〖mM〗^(-1). The reliability test was done by the cycles test and 10 days measurement, which proved that the non-enzymatic glucose sensor we made has good characteristics.

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