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研究生: 吳勇箴
Wu, Yeong-Jen
論文名稱: 壓電高分子薄膜發電特性之研究
Studies on Electricity Generating Characteristics of Polymer Piezoelectric Films
指導教授: 賴維祥
Lai, Wei-Hsiang
學位類別: 博士
Doctor
系所名稱: 工學院 - 航空太空工程學系
Department of Aeronautics & Astronautics
論文出版年: 2012
畢業學年度: 100
語文別: 中文
論文頁數: 208
中文關鍵詞: 壓電發電機
外文關鍵詞: piezoelectric, power generator
相關次數: 點閱:58下載:19
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  • 替代能源開發已經成為世界各先進國家全力以赴的目標。本論文提出了一個以軟性壓電材料發電的構想,成為現有發展中的再生新能源,並期望未來能替代部份傳統燃油發電,以達到解決傳統能源短缺問題及嚴格的環保要求。
    壓電材料雖然已經被發現與運用多年,但鮮少運用在發電的功用之上,近年來少數國家以小規模實驗的方式,將壓電陶瓷埋入馬路之下,在車輛經過時,以擠壓的方式使壓電片產生形變而發電,但受限於壓電陶瓷只能容許少量的形變。本研究提出以軟性壓電材料PVDF作為研究材料,其高撓曲特性,改良現有的壓電陶瓷受壓發電的缺點,可以將壓電片形變量提高,以增加發電量。
    現今雖然也有人提出以軟性壓電材料發電的構想,但僅限於理論推導與電腦模擬其電性,但還未實際將此構想運用在發電之上,因其中尚有電荷收集困難,單片壓電材料發電量過小的技術瓶頸待克服。故本文以軟性壓電片發電的構想深入實驗研究。
    本文首以長度(L)為討論之參數,在電腦模擬的研究中,發現壓電片在擺盪時,在長度小於4公分的情況下,形變量太小,且推動其擺盪的外力較高,當壓電片長度超出20公分之後,壓電片因幾何外型的關係,使得壓電片太柔軟,擺盪的頻率下降,所以產電能力也下降,由實驗結果可知,最佳的發電長度為17公分,符合電腦模擬的結果。
    在討論壓電片變形量與發電量關係之中,以長度17cm的壓電片為例,在受不同位移所產出的電壓,由此可看出當變形量越大時,其電壓越高,並有最佳的輸出功率P=10.231µW,但如果變形量超過14 cm之後,電壓下降。比較過4公分、8公分、17公分,這三種尺寸皆有一個共同現象,在D/L比值為0.81時,會有較佳的輸出功率。根據圖型法,將壓電片在位移距離2~16cm擺盪的狀態分別以像機拍攝,由此壓電片變形結果可以將這八種變形重新繪出圖型,其中D為形變量,h為壓電片從拉動的端點至固定點的垂直距離,由此可計算出壓電變形後的長度與原長度比值在D/L=0.81時有最大的變率,故有最大的發電輸出。
    在本文中分別探討製程、表面電極、極化等三道程序的優化與交互作用關係,一方面增加單片壓電材料的電性,並將壓電片實作出來並將其陣列化,以串聯、並聯方式提高陣列發電量。由串聯的實驗結果來看,當壓電片數量增加時,其電壓也會隨之增加,但如果超過33伏特後,電壓就不在上升。而在並聯的情況之中,電流也隨壓電片數量增加而上升。另外壓電陣列如果擺盪不同步化時,原本串聯在一起的壓電片,往前的三片仍保持串聯的效應,讓電壓上升,電流不變,但反向的壓電片產生一個負電,如同電路中的並聯效果,所以電流也會上升。在壓電陣列不同步化的運動之下,同時有串聯和並聯的效果,因為兩組運動中有電壓差,所以電壓與電流上升的比率會有轉換的損耗,故還是以同向運動來產電為最佳的情況。
    為了驗證先前電腦模擬壓電片在海中運動發電結果,將壓電片長度置於水利所造波槽之中,造波機提供穩定的海浪波型,模擬海浪對壓電片的影響,克服多片壓電材料一起運動卻不能有效增加發電量的情況。壓電片放入水中之後,在不同深度的情況下,受到波浪擺動,其產電結果,在水面靜止時為基準線,從水面線到壓電片頂端的位置為x,模擬長度17 cm的壓電片,在第三種浪條件下,受力擺盪,分別模擬x為0.5、1、1.5個振幅的距離,在受擺盪時的發電情況,在x=0.5時,最大電壓為5.11伏特,在x=1時,最大電壓為5.89伏特,在x=1.5時,最大電壓為5.32伏特,由此可看出三個深度發電十分接近,在小振幅的淺水波之中,深度對壓電片的影響不顯著,在x=1時,壓電片能配合波浪擺動,所以發電效果較佳。
    最後驗證此陣列能實際產出電力,將此陣列置入造波槽中量測隨波擺動之實際發電效能,以不同頻率與振幅的波浪使壓電陣列形變,由此比對電腦模擬之結果,壓電片發電效果和振幅有直接的關係,振幅越大,其發電效果較好。比較wave2和wave3來看波速的影響,C=1.6 m/s增加到3.3 m/s,但電壓確無顯著提升,由此可知波速的影響較小。第三種海浪時,因其高振幅與流速,所以產電效能較高,最大的電壓輸出分別為1.611、11.234、23.325伏特。在實際的環境之下操作,其產電效果比振動機的結果低,最佳為長度17 cm的壓電陣列,其發電效果在第三種浪時約為振動機的82%。在壓電片在水中受波擺盪的電腦模擬結果與實驗結果做比較,實驗組約比模擬的結果小了5.6%,此應為壓電片實際在水中擺盪時,有時會產生二次撓曲的現象,造成發電量下降,在多次平均之下與模擬的結果產生差異。
    壓電發電技術相較於其他低污染再生能源,具有成本低廉,機械構造維護簡易的優勢,且發電成本大約和現今的燃油發電相差不遠,值得發展。雖然目前發電較小,有待克服提升,但若持續發展,當各項軟硬體技術更臻成熟,期望可以將此技術取代部分現有燃油、燃煤發電,成為綠能產業的新力軍。

    This dissertation proposes an idea of generating power with flexible piezoelectric material to be a new source of developing renewable energy, in hope that it can replace part of the traditional power generating by fuel to solve the problem of conventional energy shortage and strict environment requirements. Exploring alternative energy has become a target of advanced countries worldwide, and development and application of technology in solar energy, wind energy, ocean energy and geothermal energy are actively conducted. Piezoelectric material is used now to generate power by recycling daily life waste energy such as noise and vibration, and this technology is highly valued by advanced countries.
    Although piezoelectric material has been discovered and applied for years, it is seldom used for generating power. In recent years, a few countries conducted small-scale experiments by burying piezoelectric ceramics under roads so that when a vehicle passed by, the compression would cause the piezoelectric film to deform and, thus, power was generated. However, the method was limited as the piezoelectric ceramics only allowed slight deformation. This study used flexible piezoelectric material PVDF for its pliability to improve the defect of power generation by compression of piezoelectric ceramics, and the deforming level of the piezoelectric film was increased, further enhancing amount of power generated.
    Existing piezoelectric power generating devices are of the compressed type. The vibration type generator has been suggested because of its highly flexible polymer and lower piezoelectricity. The deformation of vibration type generator is five hundred times of that of ceramics, and in theory that it can produce more power, it has gone no further than simulation analysis and no one has yet actually made it. Therefore, after a lot of experiments, this study has overcome the problems of non-synchronizing power generation between piezoelectric films and gathering of charges, and proposes to combine piezoelectric films in an array to investigate the mutual increment and decrement of resonant modes, and bring this technology a step closer to practical application.
    Although the idea of generating power by flexible piezoelectric material has been proposed by others, it is limited to theoretical derivation and computer simulation on its electric property, and the idea has not been actually applied for power generation, because there are technical problems to be solved, such as difficulty to gather electric charges and the excessively small amount of power generated by a single piezoelectric film. Therefore, this study investigates through experiments on power generation by flexible piezoelectric film, and suggests combining the films in an array to examine the decrement and increment of it resonance mode, and overcome the problem of multiple piezoelectric films operating together but were unable to effectively increase amount of power generated. This study has the technology to be one step closer to practical use.
    Finally, the electricity generation capabilities of the arrays were further verified. The array was placed in the wave generator to measure the practical effectiveness of electricity generation with oscillating waves. The piezoelectric array was deformed according to waves of different frequencies and amplitudes. Compared to the simulation, the effectiveness of the piezoelectric strips was directly related to amplitude; the larger the amplitude, the better the effectiveness of electricity generation. Compared to the effect of different waves, wave speed (C) increased from C = 1.6 m/s to 3.3 m/s, but the voltage did not increase significantly; therefore, this study inferred that wave speed generated a relatively small effect on electricity generation.
    Regarding of the third waves, the effectiveness of electricity generation was comparatively high, because of the high amplitudes and flow speeds of the waves. The maximum voltage outputs of the waves of 4, 8, 17 cm piezoelectric array were 1.611, 11.234, 23.325 Volts. In the experiment, the effectiveness of the wave generator was inferior to that of the oscillator. The optimum length of the piezoelectric array was 17 cm. The wave 3 effectiveness of the wave generator was 82 % of that of the oscillator. Regarding the simulation and experiment of the piezoelectric strip oscillating in water, the effectiveness of electricity generation of the experiment was 5.6 % smaller than that of the simulation. This may attributable to the secondary flexures occasionally induced by the piezoelectric strip when oscillating in water in the experiment, causing electricity generation to drop. So, the average result of the experiment differed from that of the simulation.
    Compared to other low emission renewable energy, the piezoelectric power generation technology has merits of low cost and easily maintained for its structure, and its power generating cost is very close to that of energy generation by fuel. Although the amount of power generated is low and needs to be improved, with continuous developing efforts, the technology of various software and hardware will grow to be mature, and hopefully by then, this technology can replace a part of the power generation by fuel and coal, and become the new force in the green industry.

    CONTENTS 摘要 I 第一章 導論 IV 第二章 壓電薄膜電性測試與製程 VI 第三章理論推導與數值模擬 VIII 第四章 壓電陣列產電結果與討論 X 第五章 壓電片製程結果與討論 XIII 第六章結論 XV 第七章未來工作之建議 …………………………………………………………… XVIII ABSTRACT XIX 誌謝 ………………………………………………………………………………… XXII CONTENTS XXIII LIST OF TABLES XXVIII LIST OF FIGURES XXIX NOMENCLATURE XXXVI CHAPTER Ⅰ INTRODUCTION 1 1.1 Historical Background of Piezoelectric Material 3 1.2 Current Technology of Piezoelectric Power Generation Application 9 1.2.1 Micro Piezoelectric Power Generator 10 1.2.2 Compressed Piezoelectric Power Generator 12 1.2.3 Vibration Type Piezoelectric Power Generator 16 1.3 Comparing With Other Renewable Energy 18 1.3.1 Solar Energy 19 1.3.2 Wind Turbine Generator 20 1.3.3 Sea Power Generator 21 1.3.4 Piezoelectric Generator 23 1.4 Piezoelectric Polymer Manufacture 24 1.4.1 The Method of Mold 25 1.4.2 Method of Thermo-Compression 27 1.4.3 Method of the Solution-Spanned 27 1.5 Polarization Process 28 1.6 Dissertation Outline 34 CHAPTER Ⅱ EXPERIMENTAL SETUP AND PVDF FILM MANUFACTURE 36 2.1 Vibration Machine and Power Output Measurement 37 2.1.1 Single Piezoelectric Film Vibration Testing 38 2.1.2 Multiple Piezoelectric Films Testing through Series and Parallel Methods 41 2.1.3 Piezoelectric Matrix Non-synchronized Testing 42 2.1.4 Piezoelectric Matrix Testing in Wave Tank 43 2. 2 PVDF Film Manufacture 47 2.2.1 PVDF Properties Test 47 2.2.2 Thermal Gravimetric Analysis 49 2.2.3 Differential Scanning Calorimeter Test 51 2.2.4 PVDF Film Manufacture Procedure 53 2.3 Coating Electrode 58 2.3.1 Electroplating Procedure 59 2.3.2 E-beam Coating Procedure 61 2.3.3 Ag Paste Coating Procedure 63 2.4 Polarized Procedure 65 2.4.1 Polarization Equipment 65 2.4.2 Polarization Setup 67 2.5 FTIR Crystal Analyze 68 2.6 Electric Properties Measurement 70 2.6.1 Piezoelectric d33 Test Machine Measurement 70 CHAPTER III PIEZOELECTRIC THEORY AND COMPUTER SIMULATION 73 3.1 The Piezoelectricity Theory 75 3.2 Matlab Module Calculate 86 3.3 Software ANSYS Simulation of Vibration 95 3.4 The Simulation of Piezoelectric Power Generator 100 3.5 The Influence of Depth on PVDF Films Power Generating 107 3.6 PVDF Vibration Simulation 108 CHAPTER IV VIBRATION TEST AND ELECTRIC PROPERTIES MEASUREMENT 110 4.1 Single Piezoelectric Film Testing on Vibration Machine 110 4.2 Displacement Effect to the Piezoelectric Film 117 4.3 Piezoelectric Matrix Testing on Vibration Machine 121 4.3.1 The Series Connect Testing on Vibration Machine 122 4.3.2 The Parallel Connect Testing on Vibration Machine 127 4.4 Piezoelectric Matrix Non-synchronized Testing 132 4.5 Piezoelectric Matrix Testing in Wave Channel 135 4.5.1 Result Piezoelectric Matrix in Case L-W=4-1~3 136 4.5.2 Result Piezoelectric Matrix in Case L-W=8-1~3 138 4.5.3 Result Piezoelectric Matrix in Case L-W=17-1~3 140 4.6 Result Comparison of Computer Simulation and Experiment of PVDF Films Swinging in Water 142 4.7 Result Piezoelectric Matrix in Case L-W=17-1~3 145 CHAPTER V EXPERIMENTAL RESULT AND DISCUSSION 147 5.1 PVDF Powder Properties 147 5.1.1 TGA Test 147 5.1.2 DSC Test 148 5.2 Result of PVDF Film Manufacturing 149 5.2.1 Mold Method 149 5.2.2 Thermal compression method 153 5.2.3 Spin Coating Method 154 5.3 Electrode Coating Procedure 156 5.3.1 Electroplating Procedure 156 5.3.2 E-Beam Coating Procedure 157 5.3.3 Ag Paste Coating Procedure 158 5.4 PVDF Film Breakdown Condition 160 5.4.1 Relation between Max Breakdown Electric Field and Temperature 161 5.4.2 Relation between Breakdown Electric Field and Polarization Time 162 5.4.3 Relation between Three Parameters 164 5.4.4 Surmmy 165 5.5 Relation between Polarization and FTIR measurement 166 5.5.1 Relation between Electric Field and Absorbance Rate 167 5.5.2 Relation between Temperature and Absorbance Rate 168 5.5.3 Relation between Time and Absorbance Rate 169 5.5.4. Comparing with Reference 171 5.6 Relation between Polarization and d33 Meter Measurement 172 5.6.1 Relation between d33 Constant and Electric Field 172 5.6.2 Relation between d33 Constant and Polarization Temperature 173 5.6.3 Relation between d33 Constant and Polarization Time 174 CHAPTER VI CONCLUSIONS 176 CHAPTER VII FUTURE WORK 179 REFERENCES 185 APPENDIX A NATURAL SYMMETRICALLY-CENTERED PIEZOELECTRIC CRYSTALS 193 APPENDIX B SURFACE BENDING 195 APPENDIX C VIBRATION MODULE 196 APPENDIX D MATLAB CODE 197 PUBLICATION LIST 206 VITA 208 LIST OF TABLES Table 1-1 The properties of PVDF [19] 8 Table 2-1 The specifications of electric meter 40 Table 2-2 Different wave frequency and amplitude has the wave conditions 47 Table 2-3 PVDF properities[71-72]. 49 Table 2-4 Ag paste properties 63 Table 2-5 Specification of d33 meter 71 Table2-6 Specification of PVDF film 72 Table 3-1 Polarization type and mechanical-electric type equations 80 Table 3-2 Relations of piezoelectric strain and displacement 88 Table 3-3 Equations of vibration module 93 Table 3-4 Relation between natural frequency and width 100 Table 3-5 Data of the sea wave 104 Table 4-1 Maximum voltage and current comparison 114 Table 4-2 Relation among R, D and V in case L=17 cm 119 Table 4-3 Relation among R, D and V in case L=4 cm 119 Table 4-4 Relation among R, D and V in case L=8 cm 120 Table 4-5 Piezoelectric matrix generate results in case L-D-Sn= 4-3.5-1~5 124 Table 4-6 Piezoelectric matrix generate results in case L-D= 8-7.8 125 Table 4-7 Piezoelectric matrix generate results in case L-D-Sn= 17-16-1~5 125 Table 4-8 Piezoelectric matrix generate results in case L-D-Pn= 4-3.5-1~5 129 Table 4-9 Piezoelectric matrix generate results in case L-D-Pn= 8-7.8-1~5 130 Table 4-10 Piezoelectric matrix generate results in case L-D-Pn= 17-16-1~5 131 Table 4-11 Data of the sea wave 143 Table7-1 Piezoelectric ceramic properties. 180 LIST OF FIGURES Page Figure 1-1 Piezoelectric generator array produces power 3 Figure 1-2 Relation between current direction and piezoelectricity [6] 4 Figure 1-3 Piezoelectric Sandwich transducers [5] 5 Figure 1-4 Piezoelectric print head which made by XAAR company[10] 6 Figure 1-5 Piezoelectric crystal structure[7] 7 Figure 1-6 Structure of the type I ZnO single crystal nano-ring[16] 11 Figure 1-7 Experimental design for converting nano-scale mechanical energy into electrical energy by a vertical piezoelectric (PZ) ZnO NW[16] 12 Figure 1-8 Design of energy leap by Chicago designer Elizabeth Redmond [20] 14 Figure 1-9 Heel strike generators, it consists of two major pieces—the Heel strike generator and the power electronics circuit. [22] 15 Figure 1-10 Hand-shaker piezoelectric generators [25] 16 Figure 1-11 Energy harvesting eel [23] 17 Figure 1-12 The wind turbine in Gao May 21 Figure 1-13 Ocean current power generation system [21] 22 Figure 1-14 Piezoelectric generator arrays [36] 24 Figure 1-15 Compression phase and cooling phase chart [42] 26 Figure 1-16 Polarization of ferroelectric ceramics by an electric field E [34] 28 Figure 1-17 P–E loops of 600 nm PZT films on Pt bottom electrode: (a) with Pt top Electrode, (b) with LNO top electrode [45] 30 Figure 1-18 Variations of d33 with the percentage of excess Pb and annealing temperature [46]. 31 Figure 1-19 Surface displacement as an electric field for a PZT film [46] 32 Figure 1-20 Relation between d33 and poling field [46] 32 Figure 1-21 FTIR absorbance spectra of PVDF thick [49] 33 Figure 2-1 Vibration machine and electric meter 38 Figure 2-2 Moving diagram of vibration machine: (a) Vibration machine remain stationary ;( b) Vibration machine moving forward; (c) Vibration machine moving back. 39 Figure 2-3 Vibration test system with vibration machine, electric meter and computer. 40 Figure 2-4 Multi-piezoelectric film matrix fixed on vibration machine. 42 Figure 2-5 Non-synchronized motion of piezoelectric matrix 43 Figure 2-6 Testing platforms: Agilent electric meter and computer in the front, flow channel and piezoelectric matrix which fixed on the testing car in the behind 44 Figure 2-7 The test channel is divided into three parts (a) the entrance of the channel, 0m to 2.25m, (b) experiment part 0.45m, (c) The rear water part is located from 10.7m to 17m with a total of 6.3m 45 Figure 2-8 The electromagnetic current the model type as UECM-200A. 46 Figure 2-9 Thermal gravimetric analysis. 51 Figure 2-10 DSC Test machine which is made by TA Instrument Company type Q10 53 Figure 2-11 Mold method manufacture procedure (a) Put PVDF powder into the mold (b)Combine mold and pressurizing parts (c) Heating in a heater (d) Cooling and get PVDF film 54 Figure 2-12 Injection machine which is made by Krauss-Maffe Company type KM50-160C2 55 Figure 2-13 Heat-compressor which is made by New Star company type 1250 56 Figure 2-14 Thermo-compression method manufactures procedure (a) Put PVDF powder between steel plates (b) Put it on the thermo-compress machine (c) Heating and compression (d) Cooling and get PVDF film 56 Figure 2-15 Spin coater procedure (a) dissolve PVDF powder in DMF (b) dropped solution on spinner coater (c) spin solution as a thin layer (d) heat this thin layer as PVDF film. 57 Figure 2-16 Ultra-sonic film thickness meter 58 Figure 2-17 Electroplating tank. 60 Figure 2-18 E-Beam machine coated electrode on PVDF film [85] 62 Figure 2-19size distributions of silver powder type BO24_06 64 Figure 2-20size distributions of silver powder type BO24_011 64 Figure 2-21 Bertan Company type 210-30R high voltage power supply 66 Figure 2-22 FTIR test machine 69 Figure 2-23 The PVDF film spectrum absorption peak 70 Figure 2-24 d33 meter which can measurement the piezoelectric strain 71 Figure 2-25 PVDF film substrates in different polarized condition 72 Figure 3-1 The interactions diagram among of the force field, electric field and temperature field [53] 74 Figure 3-2 Schematic drawings of experimental setup for: (a) a series R–L and (b) a Parallel R–L shunt circuit 81 Figure 3-3 Natural frequency value (a) copper,(b) PMMA,(c) aluminum (d) glass 94 Figure 3-4 Piezoelectric structure based on stiffness control and stroke amplification [65] 96 Figure 3-5 Lateral and vertical displacements of simulation (a) Lateral displacement of 16.7 μm; (b) vertical displacement of 0.55μm [65] 96 Figure 3-6 Measured lateral displacement for varying magnitude of 1Hz sinusoidal driving signal: (a) lateral displacement vs. time curve at 10V; (b) lateral displacement vs. applied frequency curve [65] 97 Figure 3-7 ANSYS simulation the low frequency of length and width. 98 Figure 3-8 Low frequency vibration in different length and width 99 Figure 3-9 Force in different length and width 99 Figure 3-10 Piezoelectric jellyfish in the sea 101 Figure 3-11. Geometry setup of the simulation 104 Figure 3-12 Different wave propagating functions (a) wave1 (b) wave2 (c) wave3 (d) wave4 105 Figure 3-13 Result of grid test 105 Figure 3-14 Voltage generated by wave propagating functions wave1, wave2, wave3, wave4 106 Figure 3-15 PVDF film’s voltage output in different lengths 106 Figure 3-16 Simulation diagram of PVDF films water depth tests 108 Figure 3-17 PVDF film which length is 17 cm under the Third wave’s effect outputs generated power in 3 different depths 108 Figure 3-18 comparison of experiment and simulation 109 Figure 4-1 Voltage changes with dimensionless time for case in L-D=4-3.5 111 Figure 4-2 Voltage changes with dimensionless time for case in L-D=8–7.8. 111 Figure 4-3 Voltage changes with dimensionless time for case in L-D=12.5-12 112 Figure 4-4 Voltage changes with dimensionless time for case in L-D=17-16. 112 Figure 4-5 Voltage changes with dimensionless time for case in L-D=21-20 113 Figure 4-6 When operating vibration machines, more than twice bending is occurred when the cutting-edge of the piezoelectric film is compressed, resulting in the electrical instability in case L-D=21-20 115 Figure 4-7 Voltage changes with dimensionless time in L-D= 4-3.5, 8-7.8, 12.5-12, 17-16, 21-20 115 Figure 4-8 Current changes with dimensionless time in case L-D=4-3.5, 8-7.8, 12.5-12, 17-16, 21-20 116 Figure 4-9 Power output changes with dimensionless time in case L-D=4-3.5, 8-7.8, 12.5-12, 17-16, 21-20 116 Figure 4-10 Piezoelectric film swing in case L- D=17-4~16 118 Figure 4-11 Re-built diagram which piezoelectric film swing in case L- D=17-2~16 119 Figure 4-12 Voltage output in case L-D=17-2~16. 120 Figure 4-13 I-V curve in case L-D=17-2~16 120 Figure 4-14 Power results change with Lf in 3 different lengths 121 Figure 4-15 Voltage of piezoelectric film changes with dimensionless time in case L-D-Sn=4-3.5-1, L-D-Sn=4-3.5-2, L-D-Sn=4-3.5-3, L-D-Sn=4-3.5-4, L-D-Sn=4-3.5-5 123 Figure 4-16 Voltage of piezoelectric film changes with dimensionless time in case L-D-Sn=8-7.8-1, L-D-Sn=8-7.8-2, L-D-Sn=8-7.8-3, L-D-Sn=8-7.8-4, L-D-Sn=8-7.8-5 123 Figure 4-17 Voltage of piezoelectric film changes with dimensionless time in case L-D-Sn=17-16-1, L-D-Sn=17-16-2, L-D-Sn=17-16-3, L-D-Sn=17-16-4, L-D-Sn=17-16-5 124 Figure 4-18 Piezoelectric film series 5pieces and its voltage output result in 3 different lengths 126 Figure 4-19 Current of piezoelectric film changes with dimensionless time in case L-D-Pn=4-3.5-1, L-D-Pn=4-3.5-2, L-D-Pn=4-3.5-3, L-D-Pn=4-3.5-4, L-D-Pn=4-3.5-5 128 Figure 4-20 Current of piezoelectric film changes with dimensionless time in case L-D-Pn=8-7.8-1, L-D-Pn=8-7.8-2, L-D-Pn=8-7.8-3, L-D-Pn=8-7.8-4, L-D-Pn=8-7.8-5 128 Figure 4-21 Current of piezoelectric film changes with dimensionless time in case L-D-Pn=17-16-1, L-D-Pn=17-16-2, L-D-Pn=17-16-3, L-D-Pn=17-16-4, L-D-Pn=17-16-5 129 Figure 4-22 Voltage changes with dimensionless time when non-synchronized in case L-D=8-7.8 133 Figure 4-23 Voltage changes with dimensionless time when non-synchronized in case L-D=17-16 133 Figure 4-24 Current changes with dimensionless time when non-synchronized in case L-D=8-7.8 134 Figure 4-25 Current changes with dimensionless time when non-synchronized in case L-D=17-16 135 Figure 4-26 Three kinds of wave (a) in case W-C-A = 1-1.5-5, (b) W-C-A=2-1.6-10, (c) W-C-A= 3-3.3 -15 136 Figure 4-27 Piezoelectric matrix swing in the wave channel 137 Figure 4-28 Voltage changes with dimensionless time in case L-W=4-1~3 138 Figure 4-29 Power changes with dimensionless time in case L-W=4-1~3 138 Figure 4-30 Voltage changes with dimensionless time in case L-W=8-1~3 139 Figure 4-31 Power changes with dimensionless time in case L-W=8-1~3 140 Figure 4-32 Power changes with dimensionless time in case L-W=17-1~3 141 Figure 4-33 Power changes with dimensionless time in case L-W=17-1~3 142 Figure 4-34 Wave is simulated by CFDRC in different wave propagating functions (a) wave1 (b) wave2 (c) wave3. 143 Figure 4-35 CFDRC simulation result which voltage is generated by wave propagating functions wave1, wave2, wave3 144 Figure 4-36 Result comparison of computer simulation and experiment of piezoelectric film swinging in case L-W =17-3 144 Figure 5-1 Relation between temperature and weight 148 Figure 5-2 Relation between temperature and heat flow 149 Figure 5-3 Mold of shallow trough 150 Figure 5-4 PVDF film without compression 150 Figure 5-5 New mold contains compression springs to compress PVDF 151 Figure 5-6 PVDF film manufacture in different pressure 152 Figure 5-7 PVDF films which make by injection machine 153 Figure 5-8 Steel plates in thermal compression method 154 Figure 5-9 PVDF film which is made by thermal method 154 Figure 5-10 Relation between spin speed and thickness 155 Figure 5-11 PVDF film which is made by spin coater 155 Figure 5-12 Electroplate method coating electrode on PVDF film 157 Figure 5-13 PVDF film breaks after bending 157 Figure 5-14 E-beam method coating electrode on PVDF film 158 Figure 5-15 Ag paste which is not suit PVDF film 159 Figure 5-16 Ag paste which is made by Yin-Pin Company 160 Figure 5-17 Relation between Max break electric field and polarization temperature 162 Figure 5-18 Breakdown time under fixed temperature 40oC and under each electric field intensity 67 KV/mm, 85 KV/mm under 100 KV/mm 164 Figure 5-19 Temperature 40oC and 60oC, the relation between electric field and breakdown polarization time 165 Figure 5-20 Relation between electric field and breaking time 166 Figure 5-21 FTIR Measurement (a) non-polarization PVDF film (b) polarization PVDF film 167 Figure 5-22 Relation between electric field and absorb rate 168 Figure 5-23 Electric field 67 KV/mm condition, absorb rate change with temperature 169 Figure 5-24 Relation between polarization time and absorb rate 170 Figure 5-25 PVDF films polarization under the different polarization time[90] 171 Figure 5-26 Relation between d33 constant and electric field 173 Figure 5-27 Relation between d33 Constant and Temperature 174 Figure 5-28 Relation between d33 Constant and polarization 175 Figure7-1 Relation between Piezoelectric ceramic ratio and film d33 constant [90] 181 Figure7-2 Relation between Piezoelectric ceramic ratio and film dielectric constant [90] 182 Figure7-3 SEM photo of different piezoelectric ceramic ratio (a) piezoelectric ceramic ratio 60% (b) piezoelectric ceramic ratio 70% [90] 182 Figure7-4 PVDF-PZT film 184

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