本研究針對半導體工業中濕式洗滌塔所產生的含揮發性有機物(VOC)廢水進行生物降解可行性進行評估，針對來自不同廠的兩股含高濃度COD洗滌塔廢水分別進行好氧、缺氧及厭氧之生物降解實驗，建立連續攪拌反應槽(CSTR) 進行長期測試，並藉由分子生物技術，解析反應槽內各時期之優勢微生物族群變化，以找出廢水最適合且最有效益的處理方式。
影響VOC揮發性的因素為沸點、蒸氣壓、親水性和溫度。而且來自不同濕式洗滌塔的廢水中可能含有多種VOC，因此進行批次實驗以確定可行的處理方式。根據批次實驗的結果，廢水A的VOC會在好氧條件經由曝氣而被汽提，但在缺氧條件下可被微生物分解，在缺氧並添加BioNET的生物反應槽中，經380天連續操作下可降解80%的COD。廢水B則是可以在好氧條件下有最佳降解效率，並在好氧添加BioNET生物反應槽中，經272天連續操作可處理100 mg-COD/L-h。根據初始食微比(S0/X0)範圍為0.13到9.13 g COD/g MLVSS的批次實驗中，並利用Monod-type方程式可得知在缺氧反應槽中，懸浮微生物與BioNET上的微生物最大COD比降解速率為188.5與180.7 mg/h-gVSS，其半飽和常數Ks為2.1和2.8。至於在好氧反應槽初始食微比0.5到8.4 g COD/g MLVSS的批次中，懸浮微生物之最大COD比降解速率為346.1 mg/h-gVSS，其Ks值為5.0，而BioNET上的微生物則是在Ks值為9.2時才能達到最大COD比降解速率324.1 mg/h-gVSS。另外，在分子生物技術次世代定序(NGS)結果發現，Denitratisoma和Paracoccus為缺氧槽之主要脫硝菌，而Hyphomicrobium， Burkholderiaceae，Rhodococcus ruber為反應槽中主要降解VOC之微生物族群。且從菌相分析來看，反應槽中不同時期BioNET和懸浮污泥微生物種類皆為相似，但優勢菌種會隨著反應槽的操作條件改變而有變化。

In the study, the biological degradability for treating volatile organic compounds (VOCs)- containing wastewater from wet scrubber in semiconductor industry. In the case, two wastewaters containing high concentration of COD were routinely and periodically discharged from wet scrubber and need to be treated by biological processes. Therefore, in order to investigate the feasibility and efficiency of biological treatment for VOCs-containing wastewaters, two bioreactors, under anoxic and aerobic condition, respectively, were operated in this study while batch experiments were also conducted.
Factors affecting VOC volatility includes boiling point, vapor pressure, hydrophilic and temperature. According to the results from batch experiments, COD in Wastewater A was stripped by aeration, but it can be decomposed by microorganisms under anoxic conditions. COD removal was 80% using anoxic continuous stirred tank reactor (CSTR) with BioNET addition after 380-days operation. On the other hand, COD in Wastewater B could be decomposed by microorganisms under aerobic condition. By operating aerobic CSTR with BioNET addition, COD removal rate achieved 100 mg-COD/L-h after 272 days of operation. According the batch tests under different S0/X0 ratios between 0.39 and 9.13 g COD/g MLVSS, the fitting curve of Monod-type equation presented maximum specific COD degradation rates of 188.5 and 180.7 mg/h-gVSS for suspended sludge and those in/onto BioNET from anoxic reactor, respectively. As for batches from aerobic reactor under S0/X0 between 0.5 and 8.4 g COD/g MLVSS, the suspended microorganisms will reach the maximum specific COD degradation rates of 346.1 mg/h-gVSS while that on BioNET was 324.1 mg/h-gVSS. Furthermore, the results from the next generation sequencing (NGS) indicated that Denitratisoma and Paracoccus are the main denitrifying bacteria in the anoxic reactor, while Hyphomicrobium, Burkholderiaceae and Rhodococcus ruber are probably the mainly VOC-degrading microorganisms in the aerobic reactor. And bacteria communities from suspended sludge and BioNET were similar in the same period, but the dominant microorganisms changed more obviously with different operations of the reactor.

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