本論文係有關金/銀奈米粒子被覆之矽奈米線陣列薄膜的製備及在表面增強拉曼散射(SERS)之應用研究。首先以無電鍍金屬沉積法，在矽晶片上蝕刻出矽奈米線；然後在矽奈米線上以(3-氨基丙基)三乙氧基矽烷修飾，使其表面氨基化。接著，將以檸檬酸鈉還原法製得之金奈米粒子，藉雙硫醇逐層自組裝於其表面，形成金奈米粒子被覆之矽奈米線陣列薄膜。此薄膜表面再以無電鍍法被覆銀奈米粒子，則可製得金/銀奈米粒子被覆之矽奈米線陣列薄膜。透過穿透式電子顯微鏡(TEM)、掃描式電子顯微鏡(SEM)、X光繞射(XRD)、X射線能量散佈(EDX)、及紫外光/可見光/近紅外光分光光譜(UV/VIS/NIR)等分析，可知被覆之金屬奈米粒子粒徑、形態、結構、組成、及光學特性。此外，以R6G染料之分析探討所得薄膜基材在SERS上的應用，發現金奈米粒子的粒徑與被覆層數對SERS光譜的特性峰強度皆有影響。金奈米粒子被覆之矽奈米線陣列薄膜最佳之偵測極限約為5x10-8 M，但金/銀奈米粒子被覆之矽奈米線陣列薄膜最佳之偵測極限則可再提升至約5x10-9 M。

This thesis concerns the fabrication of gold/silver-coated silicon nanowire array films and their application in surface enhanced Raman scattrting (SERS). At first, silicon nanowires were obtained by electroless metal deposition method and then modified with (3-Aminopropyl)triethoxysilane to generate amino groups on their surface. Then, the gold nanoparticles synthesized via sodium citrate reduction were layer-by-layer self-assembled onto the surface using dithiol to form the gold nanoparticles-coated silicon nanowire array film. Further electroless plating of Ag nanoparticles on the surface could yield the gold/silver nanoparticles-coated silicon nanowire array film. The size, morphology, structure, composition, and optical property of deposited metal nanoparticles were characterized by TEM, SEM, XRD, EDX and UV/VIS/NIR spectrophotometer. In addition, the application of the resultant thin films in SERS was demonstrated by the analysis of R6G. It was found that the intensities of characteristic peaks for the SERS spectra of R6G were affected by both the size and coating layer number of Au nanoparticles. For the gold nanoparticles-coated silicon nanowire array film, the detection limit was about 5x10-8 M. However, for gold/silver nanoparticles-coated silicon nanowire array film, the detection limit could be lowered to about 5x10-9 M.

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