本研究是以電子束蒸鍍系統鍍製二氧化鈦與二氧化矽，將其堆疊成分佈式布拉格反射鏡，並在其中加入以微影蝕刻製作的金屬導電柱以增加導電性，再將此結構作為矽/矽鍺串疊型太陽能電池之中間反射層。而使用電子束蒸鍍系統鍍膜時通入氧氣，可得到透明的二氧化鈦及二氧化矽薄膜，當分佈式布拉格反射鏡堆疊至2.5對時，可在波長515nm時達到55%的高反射率。將此反射鏡作為串疊型太陽能電池的中間反射層，可將頂部電池所需之短波長光源反射再利用，使頂部電池吸收層厚度減薄，提昇太陽能電池之光電流汲取效率。此外，本研究將設計的圖案導電金屬柱加入此絕緣的分佈式布拉格反射鏡，以提昇導電性。加入此導電分佈式布拉格反射鏡後，得到串疊型太陽能電池的效率為1.368%。

In this work, the titanium dioxide (TiO2) and silicon dioxide (SiO2) were alternately deposited using electron beam evaporation system to form the distributed Bragg reflector (DBR), and the conductive metal pillars prepared by photo-etching were added into the DBR to enhance the conductivity; we use this structure as the intermediate reflector in the silicon and silicon germanium tandem solar cell. Transparent TiO2 and SiO2 could be deposited by electron beam evaporation system in O2 ambient. The 65-nm-thick TiO2 film and 103.5-nm-thick SiO2 film were alternately deposited for 2.5 pairs to form the DBR with high reflectivity of 55% at wavelength of 515 nm. By using this structure as the intermediate reflector in the tandem cell, the short-wavelength light would be reflected to the top cell to be reused. Therefore, the thickness of the active layer of the top cell could be reduced, and the current extraction efficiency would be enhanced consequently. Moreover, we designed and added the patterned conductive aluminum pillars into the insulating DBR to enhance the conductivity. With this conductive intermediate reflector, the conversion efficiency of the tandem solar cell is 1.368%.

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