黃光微影後的導電氮摻雜奈米鑽石（Nitrogen doped diamond, NDD）包夾在兩層絕緣的奈米鑽石（Nanocrystalline diamond, NCD）可作為一個全碳的電阻式加熱器。鑽石有生物相容性，化學惰性，低磨損率和硬度高等特性，這有助於這一類全碳的電阻式加熱器在高度嚴苛的環境下操作，比如在腐蝕性化學品中，和電外科手術的應用上。
微波電漿增強化學氣相沉積法（Microwave plasma enhanced chemical vapor deposition, MPECVD）在Ar/CH4/N2和Ar/CH4氣體混合下，分別合成的氮摻雜奈米鑽石和奈米鑽石。氮摻雜奈米鑽石和奈米鑽石皆有高密度的鑽石成核點以成長為一片連續的薄膜。經由黃光微影之後的氮摻雜奈米鑽石薄膜可讓電流流經微影後的路徑，隨後氮摻雜奈米鑽石被奈米鑽石包覆著，形成全碳的電阻式加熱器。
應用拉曼散射、掃描電子顯微鏡、電子能譜儀、四點探針、原子力顯微鏡及高解析透射電子顯微鏡用來分析氮摻雜奈米鑽石和奈米鑽石的特性。另外紅外線溫度計應用於測繪整個鑽石加熱器的溫度分佈。

Patterned electrically conductive nitrogen doped nanocrystalline diamond (NDD) sandwiched between two insulating intrinsic nanocrystalline diamond (NCD) films severs as an all-carbon resistive heater. Biocompatibility, chemical inertness, low wear rate and high hardness of diamond help make this class of heaters useful for highly demanding applications such as heaters in corrosive chemicals and electrosurgical tools for medical practice.
NDD and NCD are synthesized by microwave plasma enhanced chemical vapor deposition (MPECVD) in Ar/CH4/N2 and Ar/CH4 gas mixtures, respectively. NDD and NCD serve as high-density diamond nuclei for the growth of NCD and NDD over layers. By patterning the shape of the NDD film for allowing an electrical current to flow through, NDD resistive heater is fabricated and subsequently encapsulated by a NCD over layer.
Raman scattering, scanning electron microscope, and high-resolution transmission electron microscope are applied to characterize NDD and NCD grown on each other. Infra-red thermometer is applied to map the temperature profile across the diamond heater and confirm satisfactory operation.

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