近年鋰電池因具有優異電化學效能而被廣泛應用。目前商用化負極材料石墨雖具高循環性佳，但電容量偏低，因此許多能與鋰離子進行嵌脫反應的元素與化合物陸續被開發，其中以具最高理論電容量的矽與鋁最受矚目。二種元素中，鋁電容量雖較低，但充放電過程中所產生之體積變化較和緩，利於維持循環性(電容量維持率)，且導電性較佳。綜合以上，可知鋁較矽更適合作為負極材料的基地相，而評估鋁-矽二元系統作為負極材料之可行性。
以射頻磁控濺鍍法(RF sputtering)製備薄膜負極具有元素分布均勻、介面附著性佳與膜厚易控制等優點，對負極材料的研究實屬適合製程。此外，薄膜材料通常具有較低結晶化程度所伴隨之較高電阻率，而添加具低電阻率元素(如:銀)與施加後熱處理可提升薄膜材料的電子傳導能力。
本研究採用射頻磁控濺鍍鋁-矽薄膜負極材料進行不同溫度(室溫、55 ˚C)下的充放電循環測試，並探討改變後熱處理溫度與添加銀(6 ~ 17 at.%)對材料微結構與充放電效能的影響，進行高溫充放電循環測試的原因是鋰電池實際使用溫度往往高於室溫，且關於電極材料於較高溫度下充放電效能的文獻仍相當缺乏。實驗結果顯示，除了電阻率下降外，結晶化程度提升與成分改變均對材料的充放電特性產生明顯影響。再者，本實驗中採用了循環伏安、電化學阻抗與穿透式電子顯微鏡探討材料嵌脫鋰反應機制，釐清充放電效能出現差異的原因。實驗發現，銀含量為10 at.%的Al0.55Si0.35Ag0.1初鍍試片與經200 ˚C-1 hr後熱處理的Al0.6Si0.4試片分別於室溫與55 ˚C下具最佳充放電效能，二者經30次循環後的電容量約為1000與1200 mAh/g，循環性約為99%，均具有市場應用性。

In this study, the cycling tests at different temperatures were carried out for the sputtered Al-Si thin film anode. Both thermal post-treatment and Ag doping can reduce higher resistivity of thin film because of lower crystallization degree. The effects of the two kinds of modification on the microstructure and electrochemical performance were investigated. The thermally post-treated and Ag-doped specimens showed lowered resistivity and different electrochemical properties from others. The transition electron microscope was carried out for the investigation on the mechanism of lithiation-delithiation and the reason of difference among the cycling performance of specimens. The as-deposited Al0.55Si0.35Ag0.1 and thermally post-treated Al0.6Si0.4 (200 ˚C-1 hr) possessed the best performance at RT and 55 ˚C respectively. Their capacity after 30 cycles were 1000 and 1200 mAh/g and both the retention of them is about 99%.

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