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研究生: 洪國議
Hung, Kuo-yi
論文名稱: (鈷鉑/銀/碳)n 多層膜之微觀結構與磁性質之研究
Investigation of Microstructure and Magnetic Properties of (CoPt/Ag/C)n Multilayer
指導教授: 李玉華
Lee, Y. H.
學位類別: 碩士
Master
系所名稱: 理學院 - 物理學系
Department of Physics
論文出版年: 2008
畢業學年度: 96
語文別: 中文
論文頁數: 88
中文關鍵詞: 鈷鉑退火多層膜序化結構頑磁場
外文關鍵詞: coercivity, anneal, CoPt, multilayer, order structure
相關次數: 點閱:103下載:1
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  • 本實驗使用直流磁控濺鍍系統在玻璃基板上製作重複 (CoPt/Ag/C) 多次之多層膜樣品,提供磁性之CoPt膜總厚度固定為300Å,改變Ag膜與C膜厚度總厚度,觀察樣品經過熱處理,樣品的晶格結構、序化程度及磁性質的影響。
    首先製作重複3次之多層膜樣品,我們發現無添加Ag層的樣品在經過600℃不同的熱退火時間, XRD圖只顯示出CoPt(111)的繞射峰,但添加Ag層的樣品顯示出代表序化結構的(001)繞射峰。
    其次製作重複6次的多層膜樣品,我們將Ag膜總厚度分別固定為20 及30 Å,前者經過600℃退火處理,XRD圖除了主要的(111)峰值還有微弱的(001)峰值,隨著退火溫度提升至700℃,(001)峰值則清楚可見不過依然比(111)峰值強度小非常多;後者在600℃時已有明顯(001)峰值,而且強度比(111)峰值大。磁性方面前者與後者之頑磁場皆隨退火溫度與C膜厚度的提升而變大,不過卻也出現軟磁性的雜相,而磁滯曲線上出現雙肩現象。
    最後製作重複9次之多層模樣品,並將Ag膜總厚度固定為30 Å,樣品經600℃退火即可序化,並且頑磁場隨C膜厚度增加而遞減。
    顆粒間之交互作用,當樣品經600℃退火處理主要為靜磁交互作用力。但經700℃退火處理,交換偶合為主要之作用力。

    We deposited the triple element nanocomposite films of (CoPt/Ag/C)n multilayer as well as CoPt/Ag/C trilayer on the fused-silica substrates by DC magnetron sputtering system keeping the thickness of CoPt at 300Å, in order to investigate the effects of Ag and C layer thickness on the crystal structure、order degree and magnetic properties after annealing, and n is the repetition number.
    In the first place, we fabricated the samples of n=3, after annealing only revealed (111) peak in the XRD patterns for the samples not added Ag layers; but ones added Ag layers revealed the (001) peak that means fct order structure.
    Secondly, we fabricated the samples of n=6 and varied the Ag thickness 20 and 30 Å, the former annealing at 600 and 700°C have strong (111) peak and weak (001) peak;the later annealing at 600℃ already has obvious (001) peak. Both coercivities increased with the annealing temperature and the thickness of C layer increasing. However, the shoulder leaded by soft magnetic phase was observed at low field in M-H curve.
    Finally, we fabricated the samples of n=9 and kept the thickness of Ag at 30Å, after annealing at 600°C. They can become fct structure. The coercivities increased with the thickness of C layer decreasing.
    The interaction between the grains originated in the magnetostatic interaction for the samples annealing at 600°C, but mainly in the exchange interaction for the ones annealing at 700°C.

    目錄 第一章 序論------------------------------------------1 1-1 前言----------------------------------------------1 1-2 背景與研究動機------------------------------------6 第二章 基本理論與文獻回顧----------------------------8 2-1 濺鍍理論--------------------------------------8 2-2 磁性基本理論----------------------------------11 2-2-1 物質的磁性質理論------------------------------11 2-2-2 磁異向性--------------------------------------18 2-3 CoPt 的序化-----------------------------------19 2-4 磁交互作用------------------------------------21 2-5 文獻回顧-----------------------------------------24 第三章 樣品製作與量測--------------------------------27 3-1 樣品製作--------------------------------------27 3-1-1 直流磁控濺鍍系統------------------------------27 3-1-2 鍍膜步驟與實驗參數----------------------------30 3-1-3 熱處理----------------------------------------32 3-2 樣品特性量測----------------------------------33 3-2-1 膜厚量測--------------------------------------33 3-2-2 繞射分析------------------------------------35 3-2-3 磁性質量測------------------------------------36 3-2-4 微觀結構觀察----------------------------------37 3-2-5 成分分析--------------------------------------38 第四章 實驗結果與討論-------------------------------39 4-1 未添加Ag膜之 ( CoPt / C )3 多層膜----------------41 4-2 添加Ag膜之 ( CoPt / Ag / C )3 多層膜-------------45 4-3 重複六次之 ( CoPt / Ag / C )6 多層膜-------------53 4-4 重複九次之 ( CoPt / Ag / C )9 多層膜-------------66 4-5 單層Ag膜固定為3.5Å之 ( CoPt / Ag / C )6 多層膜---72 4-6 磁交互作用之實驗結果與討論-----------------------81 第五章 結論------------------------------------------84 參考文獻-----------------------------------------------86

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