氣體感測器對於現今為了預防毒氣、食物腐敗…等，是個不可或缺的角色，其中以測量表面電阻率的金屬氧化半導體感測器因半導體製成技術進步而為主要感測法。不過由於理論上極度複雜牽扯於外界環境，也因此常使用現象學表示而沒有良好的物理參數的解釋。其中現象學表示已Langmuir equation最為有名，不過還是可設法利用熱統計力學去呈現出Langmuir equation的架構出來，也因此我們利用波茲曼傳輸方程式嘗試去建構且廣義Langmuir equation，並且利用聲學與流體動力學的方式去證明之，並預測必能提高感測器的反應與回覆速率與影響一定的感測器靈敏度，而最終能設計出一個利用駐波法的高敏感性氣體感測器出來。

Today, Gas sensor is indispensable for preventing toxic gas, food spoilage…etc. among them, the metal oxide semiconductor gas sensor is the main sensing method for measuring resistance due to advances in semiconductor manufacturing technology. However, because of the complex theory involved in the external environment, the phenomenological representation is often used, and it hasn’t good explanation of the physical parameters. For example, The Langmuir equation is the most famous phenomenological representation, although it is still possible to use statistical physics to present its structure. Therefore, we try to construct and generalize the Langmuir equation by the Boltzmann transport equation and prove it by the experiment of acoustics and fluid dynamics. We also predict that the response and recovery rate of the sensor will be improved and the sensitivity of the sensor will be affected. Finally, we can design a highly sensitive gas sensor using the standing wave method.

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