本文研究為將多個微型天線進行耦合，並依此製作成積體化電磁場感測器元件，產生多重頻率的疊加現象，可用來做為寬頻或多頻率響應電場與磁場的感測器。並對設計的天線進行電磁場數值模擬，以模擬假設所需的響應頻率，以此條件進行天線圖形光罩的製作。
元件晶片採用Z切方向的鈮酸鋰，以熱退火製作鈦擴散光波導的馬式調制器，在緩衝層後，疊上電極天線完成多偶極電磁場感測器元件。另外一元件則是在完成調制電極後，接續成長隔絕層與天線，得到多重環矩形電磁感測器元件。之後再經過良好的封裝完成感測器，並使用標準量測環境，驗證模擬與實作的吻合度，並對結果做分析。

The purpose of my research is to fabricate multi-antenna which is coupling several micro antennas. The EM field sensor with multi-antenna has the appearance of superposition of different frequencies. It can be use to fabricate wideband or multi-frequencies sensor. We design antenna by the results of simulation, and make its mask.
We select z-cut LiNbO3 wafer to fabricate waveguides by Ti-diffusion. After deposited buffer layer, plus electrodes and antenna. The device have be down. Another device need to deposit insulate layer after electrodes, and fabricate antenna finally. Package is necessary to do before measurement. Then we must to test and verify the frequency spectrum results between simulation and fact.

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