在本論文中，我們提出一種新式的天線製程法，利用半導體製程使用各種不同的靶材在透明的機版上成長透明的導電薄膜，用以取代現今傳統的FR4機版上的銅箔及玻璃纖維機版，一來可以增加美觀，二來可以實現天線透明化，達到天線隱形的效果。
天線方面則是採用具寬頻及具有全向性場型的共面波導的饋入方式，在選用相較偶極天線可以縮小一半體積的單極天線，來製作多組共面波導饋入之單極天線天線，結合共面波及單極天線的優點。製程方面利用兩種不同的光罩與不同的成長溫度製作天線，分別利用不同靶材包含金、氧化铟錫、氧化鋅鋁等，製作於透明機版上，再個別比較其特性結果。

In this thesis a novel process of transparent antennas is presented. Targets are used to deposit the transparent conductive film which is used by antennas to radiate electromagnetic wave on transparent substrate. It is not only artistic but also achieves the transparent antenna.
A CPW (coplanar waveguide)-fed antenna is chosen in this process due to its omni-directional radiation patterns and wideband. The monopole antenna is also adopted due to that it is half size of dipole antenna. The process of each material is presented in this thesis. Two kinds of masks are shown in chapters. Au, ITO, AZO, all these materials are used to create transparent conductive films which is low resistivity.

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