本論文中，我們以氣相傳輸沉積法（vapor phase transport deposition , VPTD）控制氧化鋅奈米線之成長方向，並且成功的研製太陽能電池、紫外線檢測器、真空壓力感測器、一氧化碳感測器和酒精感測器之奈米結構元件。首先，垂直成長方面，類階梯狀的氧化鋅奈米線被製作在ZnO:Ga/glass基板，電子穿透顯微鏡（TEM）結果指出，契合的特性是可以在 凌柱面形成，而(0002)面是以磊晶方式成長。分析結果也發現 面較(0002)面穩定。製作異貭結構太陽能電池方面，p型-氧化銅(Cu2O)濺鍍在垂直n型-氧化鋅奈米線上且形成異貭接面二極體。實驗結果發現，二極體的啟始電壓為0.46V，而太陽能的短路電流、開路電壓、充滿因數（fill factor, FF）和功率轉換效率分別為2.35 mA/cm2, 0.13 V, 0.29 和大約0.1%。
選區與側向成長技術是被用於製作紫外光檢測器、真空壓力感測器與酒精氣體感測器。在不同的成長條件下，藉由氣相傳輸沉積法分別將垂直和側向的氧化鋅奈米線製作在圖案化(pattern)的ZnO:Ga/glass基板上。垂直的氧化鋅奈米線其長度與直徑為 1 µm與50-100 nm。側向的氧化鋅奈米線其長度與直徑分別為 5 µm與30 nm並製作紫外線檢測器、真空壓力感測器與酒精感測器。紫外線檢測器元件方面，當波長362 nm的光射入的時候，側向成長的氧化鋅奈米線光檢測器在10 和15 V偏壓，其響應度分別為0.015 和0.03 A/W。真空壓力感測器方面，在低壓環境下量測，發現1*10-3 torr、 1*10-4 torr、 3*10-5 torr 和 5*10-6 torr下所對應之電流分別為17、 34.28、 57.37 與96.06 nA。酒精感測器方面，當測量溫度為180°C、230°C、260°C和300°C時，元件的響應分別為20%、35%、58% a和61%。之後固定量測溫度在300°C，改變酒精濃度為50、100、500、1000和1500 ppm時，響應分別為18%、26%、43%、55%和61%。
垂直與無方向的成長技術，製作一氧化碳氣體感測器（CO）增強酒精氣體感測器及增強一氧化碳氣體感測器。在一氧化碳氣體感測器方面，實驗條件為改變鋅蒸氣源之鋅粉量，其變化量分別為0.1 g、0.15 g、0.2 g、0.25 g、0.3 g共五組，所選用的成長溫度變化分別為600℃、650℃、700℃、750℃、800℃。實驗結果指出，當鋅蒸氣源之鋅粉量為0.1 g、0.15 g、0.2 g、0.25 g和0.3 g時，CO氣體的響應分別為5%、8%、35%、57%和29%。之後固定鋅蒸氣源之鋅粉量為0.25 g，其變化成長溫度為600℃、650℃、700℃、750℃和800℃時，CO氣體的響應分別為3%、7%、57%、7.5%和5%。實驗結果顯示氧化鋅奈米線的成長條件變化，對於其缺陷有其相關性，進而影響其氣體的感測行為。增強酒精氣體感測器方面，則是使用光化學還原技術將鈀(Pd)吸附於氧化鋅奈米線之表面，其增加表面積感應。實驗結果證明，增加鈀吸附的元件，對酒精氣體的感測響應是比無鈀吸附的奈米線好。此外，光化學還原技術也被使用在金(Au) 吸附於氧化鋅奈米線之表面，並且製作增強一氧化碳氣體感測器。在50 ppm的一氧化碳環境並且將元件加熱到350 oC。實驗結果指出，藉由金奈米粒子的吸附，敏感度是從4.2%增強至46.5%。

This study introduces a simple approach for forming ladder-like nanowires arrays. The number of apparent steps of the ZnO nanowires could be increased by the number of vapor phase transport deposition processes. The growth of two diverse forms on different planes leads to the ladder-like appearance of the nanowires: coherent characteristic on ZnO prismatic planes and epitaxial growth on ZnO (0002) planes. The planes are much more stable than (0002) planes which the planes permit boundaries procreation. We also report the deposition of p-Cu2O onto vertical n-ZnO nanowires prepared on ZnO:Ga/glass templates. With the sputtered Cu2O, the nanowires became club-like (nanowire with a head). Experimental results indicate that sputtered Cu2O also formed nano-shells surrounding the ZnO cores. The p-Cu2O/n-ZnO nanowire heterostructure exhibits rectifying behavior with a sharp turn on at ~0.46 V. Furthermore, the short-circuit photocurrent density, open circuit voltage, fill factor and conversion efficiency of the fabricated solar cell were 2.35 mA/cm2, 0.13 V, 0.29 and around 0.1%, respectively.
Vertical well-aligned and latterl ZnO nanowires were prepared on patterned ZnO:Ga/glass substrates by reactive evaporation method under different growth conditions. The average length and diameter of vertical well-aligned ZnO nanowires were around 1 µm and 50-100 nm, respectively. In contrast, the average length and diameter of latterl ZnO nanowires were around 5 µm and 30 nm, respectively. With light of wavelength 362 nm was incident, the measured responsivities were 0.015 and 0.03 A/W when the latteral ZnO nanowire photodetector was biased at 10 and 15 V, respectively. Vacuum pressure sensor was then fabricated using one single nanowire bridged across two electrodes. By measuring the I-V characteristics of the samples at low pressure, we found that the currents were of 17, 34.28, 57.37 and 96.06 nA for the ZnO nanowire measured at 1*10-3 torr, 1*10-4 torr, 3*10-5 torr and 5*10-6 torr, respectively. We also study the growth of ZnO nanowires on ZnO:Ga/glass templates and the fabrication of laterally grown ZnO nanowire ethanol sensors. It was found that resistivity of the fabricated sensor decreased upon ethanol gas injection. By introducing 1500 ppm ethanol gas, it was found that the device response were around 20%, 35%, 58% and 61% when the gas sensor was operated at 180°C, 230°C, 260°C and 300°C, respectively. It was also found that the device response at 300°C were around 18%, 26%, 43%, 55% and 61% when the concentration of injected ethanol gas was 50, 100, 500, 1000 and 1500 ppm, respectively.
In vertical and random growth, this investigation discusses the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates and the fabrication of ZnO nanowire-based CO gas sensors. The ZnO nanowires grown on a sputtered ZnO:Ga layer were vertically aligned while those grown directly on a SiO2 layer were randomly oriented. It was also found that average length of the nanowires increased while average diameter of the nanowires decreased as the amount of zinc metal powder in the quartz tube was increased from 0.1 to 0.25 g. As we further increased the amount of zinc metal power to 0.3 g, it was found that the nanowires became significantly shorter. By measuring the resistivity change of the samples at 320oC, it was found that detector sensitivities were 5%, 8%, 35%, 57% and 29% for the ZnO nanowire CO sensors prepared with 0.1, 0.15, 0.2, 0.25, and 0.3 g zinc metal powder, respectively. Furthermore, ZnO nanowire-based CO gas sensors were fabricated by growing single crystal ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates at various temperatures. It was found that average length of the nanowires increased while the average diameter of the nanowires decreased as we increased the growth temperature from 600°C to 700°C. It was also found that the nanowires became significantly shorter as the growth temperature was increased. By measuring the resistivity change of the samples at 320oC, it was found that the sensor responses were of 3%, 17%, 57%, 7.5% and 5% for the ZnO nanowires grown at 600oC, 650oC, 700oC, 750oC and 800oC, respectively. Furthermore, it was found that the sensitivity of sensor was relatively increased when the concentration of injected CO gas increased. Further, Pd adsorption on nanowire surfaces and the fabrication of ZnO nanowire-based ethanol gas sensors. With Pd adsorption, it was found that measured sensitivities of the ethanol gas sensors increased from 18.5% to 44.5% at 170oC and increased from 36.0% to 61.5% at 230oC. We also adsorbed Au nano-particles onto nanowire surfaces and fabricated ZnO nanowire CO sensors. With 50 ppm CO gas, it was found that we could enhance the device sensitivities at 350oC from 4.2% to 46.5% by the adsorption of Au nano-particles.

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