本文研究的對象為交指叉電極週期24 μm ，金屬線寬6 μm且金屬比為0.5的交指叉電極與其構成的表面聲波元件，研究範圍包括理論模擬、製程實作、與實驗量測。
　　在理論方面採用B.P. Abbott所提出的模態耦合理論作為模擬分析表面聲波元件的依據，將表面聲波元件的結構以三埠矩陣形式表示，再透過矩陣串聯的方式求得完整表面聲波元件的頻率響應；並利用模擬分別探討各項設計參數對於表面聲波元件頻率響應的影響，求取最適合的設計參數。在實驗方面搭配微機電系統技術，以三種壓電材料基板(ST-cut Quartz, YZ-cut LiNbO3, 128。Y-cut LiNbO3)實地製作表面聲波元件，並以高頻探針與網路分析儀量取表面聲波元件的頻率響應。比較模擬與實驗的結果，可以發現模擬與實驗在ST-cut Quartz壓電基板上有相當程度的吻合，但是在高壓電性質的壓電基板上，如128。Y-cut LiNbO3誤差較大，在YZ-cut LiNbO3則無法淬取出實用的模擬參數。
　　本文藉由實驗量測與理論模擬的比較，可以說明模態耦合理論應用於表面聲波元件上的適用性，並且可以作為往後設計時的依據。

　　This thesis investigates several surface acoustic wave devices and their performance by means of theoretical simulation, fabrication, and experimental measurement. The devises all have interdigital transducer (IDT) with a period of 24 um and a metalization ratio of 0.5.
　　The simulation is based on coupling-of-modes theory presented by B.P. Abbott in 1989. In this theory, the uniform interdigital transducer is represented as a three-port matrix. The frequency response of SAW devices can be obtained by cascading these matrices. The design parameters of interdigital transducer which influence the frequency response can be analyzed. The SAW devices are fabricated on three kinds of piezoelectric material substrates by MEMS technology. Their frequency response is measured by microwave probe and network analyzer. Comparison between simulation and measurement indicates that both ST-cut quartz and 128˚Y-cut LiNbO3 are in good agreement. However, the simulation parameters of YZ-cut LiNbO3 cannot be accurately determined.
　　It is also demonstrated that the frequency response of non-uniform or apodized interdigital transducers can also be simulated by dividing them into several independent sections. Hence, the coupling-of-modes theory can be further applied to SAW devices such as two-port SAW filters in the future.

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